"Introduction to the Data Science Center at the NAIST"

The approach to science is changing from hypothesis-driven science, in which assumptions made by researchers are verified through experiments, to "data-driven" science, in which models that explain the assumptions are found based on experimental data obtained in various ways. The Center is developing data-driven science across information, biotechnology, materials, and their interdisciplinary fields. It is pioneering new interdisciplinary fields in these fields, promoting the development of advanced research and flexible education that meets the demands of society. Furthermore, the Center has begun pioneering activities to build a "research transformation" platform that realizes a new research cycle in which experimental, theoretical, and AI research fields are closely linked, and knowledge extracted from research results is quickly returned to determine the next research direction. This presentation will introduce the Center and its research transformation efforts, especially its measurement informatics efforts.

"Metrology Informatics on Semiconductor Materials"

  Materials Informatics is a method of exploring and designing new materials using data-driven science. For this purpose, optimizing materials fabrication processes and processing methods for data measurement and analysis are also indispensable. In recent years, it has come to be called process informatics and metrology informatics.  

  Material properties and device characteristics depend highly on the fabrication method, i.e., "process." Therefore, it is necessary to add process conditions in addition to the correlation between physical properties and structure (composition and device configuration). Measurement and analysis are essential to grasp changes in materials due to processes. Therefore, the key is extracting valuable and extensive information from the acquired data.  It is essential to accurately capture material changes caused by process conditions in process development, and quantitative measurement data is required. Using informatics methods will become increasingly important to extract more information from measurement data than ever.  

  In this talk, after describing the importance of metrology informatics from the viewpoint of so-called RX (research transformation), we will introduce examples of metrology informatics mainly related to semiconductors, including our studies, such as the dry etching process of GaN and composition fluctuations of InGaN ternary alloys by using transmission electron microscopy and the related spectroscopy.

Metrology informatics in materials and devices

The role of measurement in materials informatics

Award name: 13th Materia Paper Award, Japan Institute of Metals and Materials

Award recipients: Kazuya Okamoto (Professor, Nippon Institute of Technology), Masaaki Sugiyama (Visiting Professor, Ultra-High Voltage Electron Microscopy Center, Osaka University), Shunsuke Muto (Professor), Rika Aoyagi (Professor, Seikei University), Shigetaka Tomiya (Nara) (Professor, Japan Advanced Institute of Science and Technology)

Paper title: Consideration from Multiple Perspectives of Advanced AI Measurement Technology for the Development of Advanced Materials (Part 1) (Part 2)