Research

Our group has successfully developed a 2D electromagnetic scanning micromirror that meets these rigorous demands. We have integrated this scanner with RGB laser sources to build a complete pico-projection module featuring a total volume of just 0.34 cc, an optical scan angle of 52°, and a horizontal scan frequency of 28.9 kHz. 

• MEMS scanning micromirrors for LIDAR systems

Unlike projection displays, scanning micromirrors for LiDAR systems require a relatively large reflective surface (>3 mm in diameter) to handle high-power lasers and maximize the efficiency of receiver optics. While the required scan frequencies are lower, the primary challenges lie in maintaining a large deflection angle, preserving a perfectly flat reflective surface during dynamic actuation, and ensuring absolute mechanical robustness.

We are actively addressing these hurdles by developing advanced 1D and 2D electromagnetic scanning micromirrors boasting diameters exceeding 4 mm and scan frequencies up to 7.2 kHz.

• MEMS scanning micromirrors fabricated with 3D printing technology

We are pioneering the integration of advanced 3D printing technologies into the fabrication of scanning micromirrors. Building on our successful use of polymer and metal 3D-printed housings, we are currently developing 3D-printed 1D and 2D MEMS scanners.

Using Multi Jet Fusion (MJF) and Digital Light Processing (DLP) 3D printing technologies, we have fabricated omnidirectional scanning micromirrors. The core structural components are printed using PA 12 or ABS-like resins, which are then assembled with externally fabricated permanent magnets, self-supported coils, and reflective surfaces. Notably, our MJF 3D-printed device has successfully achieved a spiral scan pattern with a 2D Field of View (FOV) of 8°.

2. Single LED-based optical probes for optogenetics

• Optical pro array based on optical fibers and micro lens array

We have designed and fabricated an advanced optical probe array that integrates optical fibers with a microlens array formed on a silicon substrate. This 4x4 array incorporates wire electrodes to enable precise electrophysiological recording alongside targeted optical stimulation. The complete probe and electrode array is fully integrated with a single LED light source, power supply, and communication unit, making it fully capable of in-vivo testing in freely moving animals. 

• Waveguide integrated silicon optical probe

Our team has developed a highly efficient silicon-based optical probe array featuring integrated waveguides and sensing electrodes. A key innovation of this device is its unique coupling optics, utilizing a cylindrical lens and a waveguide with a plano-convex inlet. This design allows a single, conventional LED to illuminate multiple waveguides with exceptionally high coupling efficiency. The performance and viability of this optical probe array have been rigorously verified through in-vivo experiments. 

• Integrated wireless system for optogenetics

Building upon our waveguide-integrated silicon probes, we have developed a comprehensive wireless system for advanced optogenetic studies. This standalone system integrates a power source, communication module, and the optical probe array into a single platform. It allows researchers to seamlessly conduct light stimulation and four-channel electrophysiological signal recording completely wirelessly. In-vivo experiments utilizing this system are currently in progress. 

3. Energy harvesters

• Piezoelectric energy harvester using low frequency vibration as energy source

To scavenge energy from low-frequency vibrations, such as those generated by everyday human motion, we have developed a highly efficient impact-based piezoelectric energy harvester. This device utilizes a fiber-based piezoelectric material (Macro Fiber Composite, or MFC) as the primary cantilever. We have deeply explored and validated the operation principles of this device through both comprehensive simulations and empirical experiments.