Metrology Intelligence and Data Analysis (MiDA)

About us

Goal of MiDA Lab Research

MiDA Lab aims to establish an intelligent, closed-loop nanometrology framework that addresses critical challenges of measurement uncertainty at the sub-nanometer scale. As semiconductor scaling approaches atomistic dimensions and novel advanced materials exhibit increasingly complex mechanical properties, conventional characterization paradigms face fundamental bottlenecks in resolution and throughput. Tracing the evolution of metrology, MiDA Lab targets the research and development of metrology intelligence and subsequent data analysis, especially Atomic Force Microscopy (AFM) and Ellipsometry metrology.

To overcome conventional limitations, MiDA Lab presents a useful framework that combines artificial intelligence (AI), multi-physics finite element method (FEM) simulations, and real-world experiments. The framework will be validated through rigorous experimentation to map variations in physical properties of 2D materials and to optimize inline critical-dimension profiling for next-generation semiconductor nodes. Ultimately, MiDA Lab would deliver a traceable, high-accuracy, and uncertainty-aware intelligent metrology framework, significantly lowering measurement costs while accelerating time-to-market for advanced manufacturing and nanomaterials discovery.