Facilities

Diamond Turning Machine

Model: JS PRECISION DTM-250
Specification

Resolution: 10nm (linear), 1 × 10⁻⁷ ° (rotary)

Form Accuracy (Peak to Valley): ≤ 100 nm

Surface Finish (Roughness Average): ≤ 2.0 nm

Location: K116-2

Machining Center

Model: Doosan Mynx 500
Specification

Travel, Axis Feed: X/Y/Z : 1020 × 510 × 575 mm, 24 / 24 / 20 m/min

Spindle: 80 – 8,000 rpm

Table : 1,200 × 500 mm

Location: K116

FE-SEM

Model: Hitachi S-4800
Specification

Resolution: 1.0 nm (15 kV), 1.4 nm (1 kV)

Magnification Range: × 30 – × 800,000

Accelerating Voltage: 0.5 – 30 kV (100 V steps)

Location: K116

Dynamometer

Model: Kistler 9119A + 5167A
Specification

Measuring Range: |Fx/Fy/Fz| ≤ ±4 kN, Mx/My| ≤ ±125 N·m, |Mz| ≤ ±250 N·m

Resolution: ≤ 0.002 N

Sensitivity: Fx, Fz  :  –26 pC/N, Fy : –13 pC/N

Sampling rate: ≤ 100 kS/s per channel

Location: K116-2

DAQ Module

Model: cDAQ-9174, NI-9260, NI-9775
Specification

Resolution: AO : 16-bit (±10 V, ±20 mA )

Sampling rate: Chasis : 1.6 MS/s, AO : 25 kS/s per channel, DO : 7kS/s per channel

Location: K222

Nanopositioning Stage

Model: PI P-620.2CD + PI E-727.3CDA
Specification

Travel: X/Y : 100 µm × 100 µm

Resolution: ≤ 0.5 nm (Closed‑Loop, capacitive sensor)

Resonant Frequency: ~700 Hz (unloaded)

Location: K116-2

Low Frequency Accelerometer

Model: CTC AC214-1D
Specification

Sensitivity: 1000 mV/g

Frequency Range: 0.1 Hz–10 kHz

Dynamic Range: ±5 g

Location: K222

Precision Microphone

Model: CRY333-T1
Specification

Sensitivity: 50 mV/Pa

Frequency Range: 10 Hz–20 kHz

Dynamic Range: 15–145 dB SPL

Location: K222

Resonant Vibration Sensor

Model: MISTRAS R15α
Specification

Sensitivity: 80 dB V/(m/s), -63 dB V/µbar

Frequency Range: 50–400 kHz

Resonance: 75 kHz·150 kHz

Location: K222

Current Amplifier

Model: FEMTO DLPCA-200
Specification

Gain, Bandwidth: 10³–10¹¹ V/A, ≤ 500 kHz

Noise, Output Bias: ≤ 4.3 fA/√Hz , ±10 V

Location: K116-2

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