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Off-axis Magnetron Sputtering System
Off-axis Magnetron Sputtering System
3 RF magnetron sputtering gun
+ 1 DC magnetron sputtering gunGrowth temperature:Â RT ~ 1073 K
Gas: O2 and Ar
Micro-probe Station
Micro-probe Station
Temperature: RT ~ 1273 K
Gas: Ar, O2, and H2
in-situ Confocal Microscope Raman/PL Scanning System
in-situ Confocal Microscope Raman/PL Scanning System
Wavelength: 405 nm
Temperature: RT ~ 1273 K
Atmosphere: O2, Ar, and H2
Mapping (100 mm x 100 mm)
in-situ Confocal Microscope Raman/PL Scanning System Combined with Micro-probe System
in-situ Confocal Microscope Raman/PL Scanning System Combined with Micro-probe System
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