Research Field
Embedded Files
Physics-Based Plasma Engineering
Integrating Experiments & Modeling
Source engineering
Source engineering
DC, RF, MW Plasma
Plasma Diagnostics
Plasma Diagnostics
Electric, Optical, Laser Diagnostics
Plasma modeling
Plasma modeling
Instablity Physics
Our research spans a broad range of plasma physics, from traditional low-temperature plasmas to fusion plasmas, and applies this foundation to the development of plasma source technologies for semiconductor and display applications. By combining experiments, diagnostics, modeling, and simulation, we investigate plasma generation, transport, instability, and control. At the intersection of these fields, we pursue world-leading research in the physics and engineering of partially magnetized plasmas.
우리 연구실은 전통적인 저온 플라즈마부터 핵융합 플라즈마에 이르기까지 폭넓은 플라즈마 물리학을 연구하며, 이를 바탕으로 반도체·디스플레이 공정에 활용되는 플라즈마원 기술을 개발합니다.
실험, 진단, 모델링 및 시뮬레이션을 유기적으로 결합하여 플라즈마의 생성, 수송, 불안정성 및 제어 원리를 규명합니다. 특히 이러한 연구 분야가 교차하는 부분 자화 플라즈마(partially magnetized plasma)의 물리 및 공학 분야에서 세계를 선도하는 연구를 지향합니다.
Projects & Gifts
Title: Development of Energy and Incident Angle Control Technique of Ribbon-type Ion Beam for Ion Beam Etching Process
Source: Public-Private Joint Investment for Advanced Semiconductor Talent Development, Ministry of Trade, industry and Energy, Republic of Korea
Role: Co-Principal Investigator
Performance Period: 04/01/2024 – 12/31/2026
Title: Kinetic Modelling
Source: Confidential, United States of America
Role: Principal Investigator
Performance Period: 03/13/2023 – 10/31/2023
Title: Exploring the Instability and Transport Dynamics of Partially Magnetized Plasmas in E×B Source for Semiconductor Process
Source: Mid-career Researcher Program, National Research Foundation of Korea, Republic of Korea
Role: Principal Investigator
Performance Period: 03/01/2023 – 02/28/2026
Title: Kinetic Simulation of Narrow Gap Discharge
Source: Princeton Collaborative Low-Temperature Plasma Research Facility, Department of Energy, Office of Science, Fusion Energy Sciences, United States of America
Role: Principal Investigator
Performance Period: 03/01/2022 – 10/31/2022
Title: Development of Plasma and Ion Beam Diagnostics for Multi-pulsed Negative Ion Source
Source: Nuclear Convergence Technology Development, National Research Foundation of Korea, Republic of Korea
Role: Principal Investigator
Performance Period: 03/01/2021 – 12/31/2022
Title: Experimental Study on Transport of Electron and Negative Ion at the Boundary between Electron-ion and Ion-ion Plasma
Source: Young Researcher Program, National Research Foundation of Korea, Republic of Korea
Role: Principal Investigator
Performance Period: 03/01/2020 – 02/28/2023
Title: Development of the Most Effective Negative Hydrogen Volume Ion Source in Application of Neutral Beam Injection Systems for Future Nuclear Fusion Reactor
Source: Global Ph.D. Fellowship, National Research Foundation of Korea, Republic of Korea
Role: Principal Investigator
Performance Period: 03/01/2015 – 02/28/2018
Title: Ion Source Characterization Study
Source: Confidential, United States of America
Role: Co-Principal Investigator
Performance Period: 10/28/2019 – 04/30/2021
Page updated
Google Sites
Report abuse