Publications

International conference papers

Floating 5-μm-diameter needle for low invasive chronic recording.  Koji Yamashita, Hirohito Sawahata, Shota Yamagiwa, Rika Numano, Kowa Koida, and Takeshi Kawano. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), June 2019. 

A high-density array of 3D microneedle-electrodes for evaluation of spatial resolution of neuronal activity. Yuta Kotani, Hirohito Sawahata, Shota Yamagiwa, Rika Numano, Kowa Koida and Takeshi Kawano. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), June 2019. 

Three dimensional core-shell microneedle-electrode for multisite neuronal recoding. Shinnosuke Idogawa, Yoshihiro Kubota, Shota Yamagiwa, Hirohito Sawahata, Rika Numano, Kowa Koida and Takeshi Kawano. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), June 2019. 

Nanoneedle-electrode array packaged with amplifiers for recording biological-signals with a high voltage gain. Shuhei Tsuruhara, Yoshihiro Kubota, Hiroshi Kubo, Hirohito Sawahata, Shota Yamagiwa, Shinnosuke Idogawa and Takeshi Kawano. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), June 2019. 

Highly stretchable Kirigami structure with integrated LED chips and electrodes for optogenetic experiments on perfused hearts. Yusuke Morikawa, Suleman Ayub, Oliver Paul, Takeshi Kawano and Patrick Ruther. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), June 2019. 

Sewing bioprobe. Koji Yamashita, Hirohito Sawahata, Shota Yamagiwa, Yusuke Morikawa, Rika Numano, Kowa Koida and Takeshi Kawano. IEEE International Conference on Micro Electro Mechanical Systems (MEMS), January 2019. 

Dissolvable material-sheathed microneedle-electrode device slid into a narrow gap of the brain. Shota Yamagiwa, Hirohito Sawahata, Rika Numano, Makoto Ishida, Kowa Koida and Takeshi Kawano. IEEE International Conference on Micro Electro Mechanical Systems (MEMS), January 2018. 

Single needle electrode-topped amplifier package (STACK) for in vivo applications. Yuto Kita, Hiroshi Kubo, Hirohito Sawahata, Shota Yamagiwa, Xian Long, Angela Leong, Rika Numano, Kowa Koida, Makoto Ishida and Takeshi Kawano. IEEE International Conference on Micro Electro Mechanical Systems (MEMS), January 2018. 

Stretchable micro-doughnuts Kirigami bioprobe. Yusuke Morikawa, Shota Yamagiwa, Hirohito Sawahata, Rika Numano, Kowa Koida, Makoto Ishida and Takeshi Kawano. IEEE International Conference on Micro Electro Mechanical Systems (MEMS), January 2018. [Also selected for Student Paper Award Finalist] 

Long nanowire arrays for in vitro and in vivo DNA injections into cells in brain tissues. Yoshihiro Kubota, Rika Numano, Akihiro Goryu, Hirohito Sawahata, Shota Yamagiwa, Minako Matsuo, Makoto Ishida and Takeshi Kawano.IEEE International Conference on Micro Electro Mechanical Systems (MEMS), January 2018. 

In vivo neuronal recordings using threedimensional microneedle-electrode assembled on flexible substrate. Shota Yamagiwa, Hirohito Sawahata, Rika Numano, Makoto Ishida, Kowa Koida  and Takeshi Kawano. 2017 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), June 2017. 

Ultra high-aspect-ratio neuroprobe: 5-μm-diameter and 400-μm-length needle detects action potentials in vivo. Shota Yamagiwa, Hirohito Sawahata, Hideo Oi, Rika Numano, Makoto Ishida, Kowa Koida  and Takeshi Kawano. IEEE International Conference on Micro Electro Mechanical Systems (MEMS), January 2017. 

Hook and loop microfastener: flexible microelectrodes tied to a nerve. Yusuke Seki, Shota Yamagiwa, Yusuke Morikawa, Hirohito Sawahata, Rika Numano, Makoto Ishida and Takeshi Kawano. IEEE International Conference on Micro Electro Mechanical Systems (MEMS), January 2017. [Also selected for Student Paper Award Finalist] 

Design of tranceimpedance amplifier for silicon wisker neuroprobe. Xian Long, Angela Leong, Ippei Akita, Hiroki Makino, Hirohito Sawahata, Makoto Ishida and Takeshi Kawano. Asia Pacific Conference on Transducers and Micro/Nano Technology (APCOT 2016), January 2016. 

Vapor-liquid-solid growth of silicon-wires on (111)-textured platinum film/dioxide/silicon. Makoto Yamahira, Hideo Oi, Satoshi Yagi, Yasuyuki Uraoka, Makoto Ishida and Takeshi Kawano. Asia Pacific Conference on Transducers and Micro/Nano Technology (APCOT 2016), January 2016. 

A low-noise low-power neural recording amplifier on flexible thin film for fully implantable neural interface devices. Prabhath J, Horagodage, Kenji Okabe, Hajime Fukumaru, Takeshi Kawano, Makoto Ishida and Ippei Akita. Asia Pacific Conference on Transducers and Micro/Nano Technology (APCOT 2016), January 2016. 

An origami-inspired ultrastretchable bioprobe film device. Yusuke Morikawa, Shota Yamagiwa, Hirohito Sawahata, Makoto Ishida and Takeshi Kawano. IEEE International Conference on Micro Electro Mechanical Systems (MEMS), January 2016. 

High-performance microelectrode of PEDOT/Pt-black for low voltage neurostimulation. Kentaro Yamaguchi, Masanori Tanaka, Shota Yamagiwa, Hiroto Sawahata, Rika Numano, Makoto Ishida and Takeshi Kawano. IEEE International Conference on Micro Electro Mechanical Systems (MEMS), January 2016. 

Toyohashi probe: single whisker electrode blockmodule-devices. Hirohito Sawahata, Shota Yamagiwa, Airi Moriya, Hideo Oi, Yoriko Ando, Rika Numano, Makoto Ishida, Kowa Koida and Takeshi Kawano. Interdisciplinary Research and Global Outlook (IRAGO) conference 2015, October 2015. 

Bright-field imaging by fiber bundle endoscopy: vertical reconstruction from multi-positional illumination. Yoriko Ando, Kowa Koida, Hirohito Sawahata, Takashi Sakurai, Mitsuo Natsume and Takeshi Kawano, Rika Numano. Interdisciplinary Research and Global Outlook (IRAGO) conference 2015, October 2015. 

Vertically integrated platinum-clad/silicon dioxide-shell microtube arrays for optogenetic applications. Tomoyuki Matsuo, Tomohiko Nakamura, Shota Yamagiwa, Hirohito Sawahata, Makoto Ishida and Takeshi Kawano. Interdisciplinary Research and Global Outlook (IRAGO) conference 2015, October 2015. 

Fabrication of through-silicon via silicon island arrays for high-density microneedle devices. Yasuyuki Uraoka, Hideo Oi, Makoto Ishida and Takeshi Kawano. Interdisciplinary Research and Global Outlook (IRAGO) conference 2015, October 2015.

In vivo recordings via microscale diameter neuroprobe assembled on flexible package. TEO Dong Sheng, Hirohito Sawahata, Shota Yamagiwa, Airi Moriya, Hideo Oi, Yoriko Ando, Rika Numano, Makoto Ishida, Kowa Koida and Takeshi Kawano.Neuroscience 2015, October 2015.

Nanowire transgene injector arrays. Yoshihiro Kubota, Akihiro Goryu, Rika Numano, Makoto Ishida and Takeshi Kawano. Nanotechnology, Neuroscience 2015, October 2015. 

Self-curling and - sticking flexible thin-film ECoG array device. Shota Yamagiwa, Hirohito Sawahata, Makoto Ishida and Takeshi Kawano. Neuroscience 2015, October 2015. 

A thin film flexible antenna with CMOS rectifier chip RF-powered implantable neural interfaces. Kenji Okabe, Ippei Akita, Shota Yamagiwa, Takeshi Kawano and Makoto Ishida. 2015 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), June 2015. 

Flexible optorode array: parylene-film waveguide arrays with microelectrodes for optogenetics. Shota Yamagiwa, Makoto Ishida and Takeshi Kawano. 2015 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), June 2015. 

Vertically aligned extracellular microprobe arrays/(111) integrated with (100)-silicon MOSFET amplifiers. Hiroki Makino, Kohei Asai, Masahiro Tanaka, Shota Yamagiwa, Hirohito Sawahata, Ippei Akita, Makoto Ishida and Takeshi Kawano. IEEE International Conference on Micro Electro Mechanical Systems (MEMS), January 2015. 

An array of vertically aligned nanoscale tipped microprobe electrodes. Yoshihiro Kubota, Hideo Oi, Hirohito Sawahata, Akihiro. Goryu, Makoto Ishida and Takeshi Kawano. Neuroscience 2014, November 2014.

In vivo recordings via microscale diameter neuroprobe block devices. Hirohito Sawahata, Shota Yamagiwa, Airi Moriya, Hideo Oi, Yoriko Ando, Rika Numano, Makoto Ishida, Kowa Koida and Takeshi Kawano. Neuroscience 2014,November 2014. 

Microfabricated single whisker electrode for neural recording. Shota Yamagiwa, Hirohito Sawahata, Kowa Koida, Makoto Ishida and Takeshi Kawano. Neuroscience 2014, November 2014. 

A vertically integrated nanoscale tipped microprobe intracellular electrode array. Yoshihiro Kubota, Hideo Oi, Hirohito Sawahata, Akihiro. Goryu, Makoto Ishida and Takeshi Kawano. IEEE International Conference on Micro Electro Mechanical Systems (MEMS), January 2014. 

Dissolvable material for high-aspect-ratio flexible silicon-microwire penetrations. Satoshi Yagi, Shota Yamagiwa, Tatsuya Imashioya, Hideo Oi, Yoshinobu Kubota, Makoto Ishida and Takeshi Kawano. IEEE International Conference on Micro Electro Mechanical Systems (MEMS), January 2014. 

Micro-electrode arrays for multi-channel motor unit EMG recording. Shota Yamagiwa, Hirohito Sawahata, Makoto Ishida and Takeshi Kawano. IEEE International Conference on Micro Electro Mechanical Systems (MEMS), January 2014. 

Toyohashi Probe-road to actual usable neuroprobe-. Hideo Oi, Takeshi Kawano and Makoto Ishida. Interdisciplinary Research and Global Outlook (IRAGO) conference 2013, October 2013. 

Development of a System for Neuronal Recording with the Toyohashi Probe. Hirohito Sawahata, Yoriko Ando, Shota Yamagiwa, Hideo Oi, Makoto Ishida, Takeshi Kawano, Rika Numano and Kowa Koida. Interdisciplinary Research and Global Outlook (IRAGO) conference 2013, October 2013. 

Multisite wide-area depth transfers of nanoparticles into a soft material via nanotip robe arrays. Akihiro Goryu, Rika Numano, Makoto Ishida and Takeshi Kawano. 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), June 2013. 

Metal/silicon dioxide microtube improves optical and electrical properties of neuroprobe. Tomohiko Nakamura, Masahiro Sakata, Akihiro Goryu, Makoto Ishida and Takeshi Kawano. IEEE International Conference on Micro Electro Mechanical Systems (MEMS), January 2013.

Verification of bending strength of vapor-liquid-solid grown high-aspect-ratio silicon-neuroprobes. Tatsuya Imashioya, Hideo Oi, Satoshi Yagi, Makoto Ishida and Takeshi Kawano. IEEE International Conference on Micro Electro Mechanical Systems (MEMS), January 2013.

Self-curling and -sticking flexible substrate for ECoG electrode array. Shota Yamagiwa, Makoto Ishida and Takeshi Kawano. IEEE International Conference on Micro Electro Mechanical Systems (MEMS), January 2013. 

Vapor-liquid-solid grown silicon-wires compatible (100)-silicon CMOS process. Kohei Asai, Akihiro Okugawa, Makoto Ishida and Takeshi Kawano.Asia-Pacific Interdisciplinary Research Conference (AP-IRC) 2012, November 2012.

Multi-ERG recording from carp retina by penetrating electrode array with various length microprobes. Tetsuhiro Harimoto, Akihito Ikedo, Takeshi Kawano, Akito Ishihara, Akifumi Fujishiro, Shota Yamagiwa, Akihiro Goryu, Makoto Ishida and Shiro Usui. Asia-Pacific Interdisciplinary Research Conference (AP-IRC) 2012, November 2012.

Nanoprobe array for gene transfer into individual cells. Akihiro Goryu, Rika Numano, Makoto Ishida and Takeshi Kawano. 2012 MRS Spring Meeting, April 2012.

Hybrid penetrating- and planer-microelectrode array for simultaneous recording of ECoG and intracortical neural activity. Tatsuya Imashioya, Akifumi Fujishiro, Hirohito Sawahata, Haruo Toda, Akihito Ikedo, Makoto Ishida, Isao Hasegawa and Takeshi Kawano. 2012 MRS Spring Meeting, April 2012. 

Layer-by-layer nanoassembly of iridium oxide/platinum-black for low impedance, high charge injecting microelectrode applications. Shota Yamagiwa, Akifumi Fujishiro, Akihito Ikedo, Makoto Ishida and Takeshi Kawano. IEEE International Conference on Micro Electro Mechanical Systems (MEMS), January 2012. 

Fabrication of force sensitive penetrating electrical neuroprobe arrays. Shogo Morita, Akifumi Fujishiro, Akihito Ikedo, Makoto Ishida and Takeshi Kawano. IEEE International Conference on Micro Electro Mechanical Systems (MEMS), January 2012.

Simultaneous recordings of surface and intra-retinal electroretinograms using a penetrating- and planer-electrode array. Tetsuhiro Harimoto, Akihito Ikedo, Takeshi Kawano, Akito Ishihara, Akifumi Fujishiro, Shota Yamagiwa, Akihiro Goryu, Shiro Usui and Makoto Ishida. Asia-Pacific Interdisciplinary Research Conference (AP-IRC) 2011, November 2011. 

Multi-site electroretinogram recordings via enlarged gold tipped microprobe arrays. Tetsuhiro Harimoto, Kuniharu Takei, Takeshi Kawano, Akito Ishihara, Takahiro Kawashima, Hidekazu Kaneko, Makoto Ishida and Shiro Usui.European Retina Meeting (ERM) 2011, September 2011.

Electrical catching and transfer of nanoparticles via nanotip silicon probe arrays. Akihiro Goryu, Akihito Ikedo, Makoto Ishida and Takeshi Kawano. 2011 16th International Conference on SolidState Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), June 2011. 

Temperature sensitive microwire arrays for artificial whisker electronics. Akihito Ikedo, Makoto Ishida and Takeshi Kawano. IEEE International Conference on Micro Electro Mechanical Systems (MEMS), January 2011. 

A penetrating micro-scale diameter probe array for in-vivo neuron spike recordings. Akifumi Fujishiro, Hidekazu Kaneko, Takahiro Kawashima, Makoto Ishida and Takeshi Kawano. IEEE International Conference on Micro Electro Mechanical Systems (MEMS), January 2011. 

A vertical micro-scale light guiding silicon dioxide tube array for optical neurostimulator. Masahiro Sakata, Akihiro Goryu, Akihito Ikedo, Tetsuhiro Harimoto, Makoto Ishida and Takeshi Kawano.IEEE International Conference on Micro Electro Mechanical Systems (MEMS), January 2011.

Integration and 3D fabrication techniques to nanoscale-tip silicon high-aspect-ratio Microprobe Arrays. Akihiro Goryu, Akihito Ikedo, Takeshi Kawano and Makoto Ishida. IEEE International Conference on Micro Electro Mechanical Systems (MEMS), January 2010. 

Heterogeneous integration of vapor-liquid-solid grown silicon microprobe arrays/(111) and MOSFETs/(100) using silicon on insulator substrate. Akihiro Okugawa, Kotaro Mayumi, Takeshi Kawano and Makoto Ishida. IEEE International Conference on Micro Electro Mechanical Systems (MEMS), January 2010.

Integrated SiO2 microtube-based electrical neuroprobe array. Kuniharu Takei, Akifumi Fujishiro, Takahiro Kawashima, Kazuaki Sawada, Hidekazu Kaneko, Takeshi Kawano and Makoto Ishida. 2009 15th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), June 2009. 

Multisite field potential recording from retina via vapor-liquid-solid grown silicon probe array. Tetsuhiro Harimoto, Akito Ishihara, Takeshi Kawano, Kuniharu Takei, Hidekazu Kaneko, Makoto Ishida and Siro Usui. 2009 15th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), June 2009. 

Out-of-plane microwire force sensor arrays with embedded p-n diodes by selective vapor-liquid-solid growth. Akihito Ikedo, Takeshi Kawano and Makoto Ishida. 2009 15th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), June 2009. [We won one of four Outstanding Paper Awards at Transducers'09] 

Sub-5μm diameter silicon bicroprobe and silicon dioxide microtube arrays for lowinvasive in-vivo animal experiments. Kuniharu Takei, Takeshi Kawano, Takahiro Kawashima, Kazuaki Sawada, Hidekazu Kaneko and Makoto Ishida. IEEE International Conference on Micro Electro Mechanical Systems (MEMS), January 2009. 

Batch fabrication of out-of-plane, IC-compatible, nanoscale-tip silicon neuroprobe arrays. Akihiro Goryu, Akihito Ikedo, Kuniharu Takei, Kazuaki Sawada, Takeshi Kawano and Makoto Ishida. IEEE International Conference on Micro Electro Mechanical Systems (MEMS), January 2009.

Vertically aligned various lengths doped-silicon microwire arrays by repeated selective vapor-liquidsolid growth. Takeshi Kawano, Akihito Ikedo, Takahiro Kawashima and Kazuaki Sawada and Makoto Ishida. IEEE International Conference on Micro Electro Mechanical Systems (MEMS), January 2009.

Source-follower amplifier array with vapor-liquid-solid grown silicon microprobe electrodes on silicon (111) substrate. Kotaro Mayumi, Kuniharu Takei, Takahiro Kawashima, Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada and Makoto Ishida. Asia Pacific Conference on Transducers and Micro/Nano Technology (APCOT 2008), June 2008.

Activation of CNT nano-to-micro contact via electrical breakdown. Yingqi Jiang, Qianhe Zhang, Takeshi Kawano, Chung Yeung Cho and Liwei Lin. IEEE International Conference on Micro Electro Mechanical Systems (MEMS), January 2008. 

Single carbon nanotube pirani gauge by local synthesis. Takeshi Kawano, Marcel Suter, Chung Yeung Cho, Heather Chiamori and Liwei Lin. 2007 14th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), June 2007.  

In-situ controlled growth of carbon nanotubes by local synthesis. Takeshi Kawano, Chung Yeung Cho and Liwei Lin. IEEE International Conference on Micro Electro Mechanical Systems (MEMS), January 2007. 

Carbon nanotube-based nanoprobe electrode. Takeshi Kawano, Chen Chung Yeung Cho and Liwei Lin.2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, January 2007. 

Recordings of retinal light responses by silicon microprobe array. Tetsuhioro Harimoto, Akito Ishihara, Takeshi Kawano, Makoto Ishida and Siro Usui . 12th International Conference on Neural Information Processing, October 2005. 

Neural recording with low-invasive Si microprobe array. Takeshi Kawano, Akito Ishihara, Tetsuhiro Harimoto, Takahiro Kawashima, Hidekuni Takao, Kazuaki Sawada, Shiro Usui and Makoto Ishida . 2005 13th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), June 2005. 

Three-dimensional multichannel Si microprobe electrode array chip for analysis of the nervous system. Takeshi Kawano, Akito Ishihara, Tetsuhiro Harimoto, Hidekuni Takao, Kazuaki Sawada, Shiro Usui and Makoto Ishida.  International Electron Device Meeting (IEEE-IEDM), December 2004. [Also selected for IEEE Electron Device Japan Chapter Student Award] 

Neural recording chip with penetrating Si microprobe electrode array by selective vapor-liquid-solid growth method. Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada and Makoto Ishida. 26th Annual international Conference of the IEEE Eng. Med. Biological Society, September 2004.

Nano-micro Si wire array on Si(111) IC chips and device applications. Makoto Ishida, Takeshi Kawano, Masato Futagawa, Yuji Arai, Hidekuni Takao and Kazuaki Sawada. Sixth International Conference on New Phenomena in mesoscopic Structures-Fourth International Conference on Surfaces and interfaces of mesoscopic Devices, November-December 2003. 

CMOS signal processing circuits on Si (111) for neural activity image-recording with epitaxially grown micro-Si probes. Yoshiko Kato, Takeshi Kawano, Yoshiaki Ito, Hidekuni Takao, Kazuaki Sawada and Makoto Ishida. 2003 12th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), June 2003. 

Neuron size Si probe array fabricated on integrated circuits for multichannel electrode. Takeshi Kawano, Yoshiko Kato, Ryoji Tani, Hiroshi Ishino, Hidekuni Takao, Kazuaki Sawada and Makoto Ishida. 2003 12th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), June 2003. 

Field electron emission device using silicon nano-wires. Kazuaki Sawada, Masato Futagawa, Yuji Arai, Takeshi Kawano, Hidekuni Takao, and Makoto Ishida. International Electron Device Meeting (IEEE-IEDM), December 2002.

Multichannel 5x5-Site 3-dimensional Si micro-probe electrode array for neural activity recording system. Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada and Makoto Ishida. International Conference on Solid State Device and Materials (SSDM), September 2002. 

Fabrication and properties of ultra small Si wire arrays by vapor-liquid-solid growth with circuits. Takeshi Kawano, Yoshiko Kato, Masato Futagawa, Ryoji Tani, Hidekuni Takao, Kazuaki Sawada and Makoto Ishida. 2001 11th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), June 2001.