At Institute: AIOT Fab Facility
E-Beam Evaporation System
Thermal Evaporation System
RF Sputter System
Horizontal Three Stack Furnace System
Double - Side Mask Aligner System
Direct Writing Maskless Lithography System
FESEM With E-Beam Lithography System
Stylus Based Profiler
Parameter Analyzer (4200A)
Wafer Probe station
At Institute: CRF Facility
Atomic Absorption Spectrometer (AAS)
FTIR Spectrometer
Raman Spectrometer
Energy Dispersive X-Ray Fluorescence Spectrometer (ED-XRF)
Inductively Coupled Plasma-Mass Spectrometer (ICP-MS)
Physical Property Measurement System (PPMS)
Transmission Electron Microscope
Powder X-Ray Diffractometer (XRD)
Time Resolved Photoluminescence (TRPL)
At EMD
Spin-coater
Hot plates
Hot air oven
Sonicator bath
CVD Furnace (soon)
Sputtering System (soon)