Patents
Patents
Nanofluid wet cleansing method for wafer and cleansing device applying the same.
Co-inventor: Jaber Al Hossain; Assignee: University of Ulsan Foundation for Industry Cooperation
KR 10-2024-0118705 (filed, 02 Sep 2024)
EP 24219802.6 (filed 13 Dec 2024)
JP 2024-220214 (filed 16 Dec 2024)
US 18/981,940 (filed 16 Dec 2024)
Nanofluid dispenser, apparatus for manufacturing semiconductor devices including the same, and method of manufacturing semiconductor devices using the same.
Co-inventor: Jaber Al Hossain; Applicant/Assignee: University of Ulsan FIC.
KR 10-2025-0068290 (filed 26 May 2025)
EP25211246.1 (filed 27 Oct 2025)
JP 2025-182072 (filed 28 Oct 2025)
US 19/373,288 (filed 29 Oct 2025)