Patents
Patents
Nanofluid wet cleansing method for wafer and cleansing device applying the same.
Co-inventor: Jaber Al Hossain; Assignee: University of Ulsan Foundation for Industry Cooperation
KR Patent KR102802910B1 (granted/published 30 Apr 2025; application filed 02 Sep 2024),
JP Patent JP7808365B1 (granted/published 29 Jan 2026; filed 16 Dec 2024),
US 18/981,940 (published 5 mar 2026; filed 16 Dec 2024),
EP 24219802.6 (filed 13 Dec 2024).
Nanofluid dispenser, apparatus for manufacturing semiconductor devices including the same, and method of manufacturing semiconductor devices using the same.
Co-inventor: Jaber Al Hossain; Applicant/Assignee: University of Ulsan FIC.
US 19/373,288 (filed 29 Oct 2025),
JP 2025-182072 (filed 28 Oct 2025),
EP25211246.1 (filed 27 Oct 2025);
KR 10-2025-0068290 (filed 26 May 2025).