지능형 광-기계 시스템 및 응용 연구실
Wavelength: 1080nm
Power: Max. 3kW
Spot diameter: 30um at a focal point
Scan field: 150mm x 150mm
Focal length: 330mm
Pulse duration: 250fs~10ps, adjustable
Wavelength: 1030 / 515 / 343nm, adjustable
Power: Max. 120W (@1030nm), 60W(@515nm), 30W(@343nm)
Spot diameter: 25um at a focal point
Scan field(Scanner with Telecentric lens): 90mm x 90mm
Scan speed(Scanner): Max. 2m/s
Scan field(Stage): 500mm X 800mm / Rotation available / Vacuum chuck to fix sample
Pulse duration: 5~350ns, adjustable
Wavelength: 1064
Power: Max. 500W
Spot diameter: 26um at a focal point
Scan field(Scanner with Telecentric lens): 90mm x 90mm
Scan speed(Scanner): Max. 5m/s
Scan field(Stage): 200mm X 200mm / Rotation available / Vacuum chuck to fix sample
Air compressor: Max. 10bar (blowing)
Fume/Particle remover: Sucktion equipment