Facilities

Atomic Layer Deposition

Probe Station

Measurement System

• Semiconductor Parameter Analyzer (HP 4155C)

• Pulse Generator (81110A)

• Oscilloscope

• Switch Matrix

Glovebox with Thermal Evaporator

Chemical Fume Hood

Tube Furnace

Thermal Evaporator (M.O. Tech)

Spin Coater

Oven

Reagent Cabinet