EQUIPMENTS

Directly available at ENTeR lab

Customized thermal ALD Station -1

CeO2

Customized Powder ALD Station -1

MoO3, ZrO2, Al2O3

UV-ALD station

TBD

Plasma-Powder ALD station

ZrO2, Nb2O5, Li2O

Glove box

Roll press

Doctor blade

Electrode punching machine (Coin cell)

Slurry mixer

Vacuum oven

Plasma-Enhanced ALD(CCP type) (ISAC)

Zirconium Dioxide (ZrO2), Titanium Dioxide (TiO2), Aluminium Oxide (Al2O3), Hafnium Oxide (HfO2)

Customized Plasma-Enhanced ALD (HCP type)

Al2O3, Fe2O3, Pt

RF,DC - Sputter(KVS2000)

Metal target : Pt,Ru,Ni,Ti,Al,Cu,Au

Oxide target : YSZ,SDC,Zr/Y,ITO

Ellipsometer (FS-1EXG2)

SOFC station (Customized)

Gas : H2, CH4

SOEC station (Customized)

Gas : Steam electrolysis 

Potentiostat(BioLogic)

LCR meter (Wayne Kerr LCR meter - 4100)

Source meter (Keithley 2636 Sourcemeter)

Customized SOFC probe station (EC-LAB)

Tube Furnace

Furnace