EQUIPMENTS

Directly available at ENTeR lab

Customized thermal ALD Station -1

CeO2, ZrO2

Customized Powder ALD Station -1

Li-ion Cathode

Customized Powder ALD Station -2 (connect to Glove Box)

TBD

Plasma-Enhanced ALD(CCP type) (ISAC)

Zirconium Dioxide (ZrO2), Titanium Dioxide (TiO2), Aluminium Oxide(Al2O3)

Customized Plasma-Enhanced ALD(HCP type)

RF,DC - Sputter(KVS2000)

Metal target : Pt,Ru,Ni,Ti,Al,Cu,Au

Oxide target : YSZ,SDC,Zr/Y,ITO

Ellipsometer (FS-1EXG2)

SOFC station (Customized)

Gas : H2, CH4

SOEC station (Customized)

Gas : Steam electrolysis 

Potentiostat(BioLogic)

LCR meter (Wayne Kerr LCR meter - 4100)

Source meter (Keithley 2636 Sourcemeter)

Customized SOFC probe station (EC-LAB)

Glove box (MBRAUN)

Tube Furnace

Furnace

Available on Seoultech campus

Customized Plasma-Enhanced ALD(ICP type)

Ruthenium, Platinum

RF,DC - Sputter (KVS-2000)

Samaria doped ceria (SDC), Yttria stabilized zirconia (YSZ), Pt, Ni, Ru, Indium Tin Oxide (ITO) 

Reflectometer(KMAC) 

X-ray diffractometer (XRD, Bruker DE/D8, Bruker)

TEM (JEM-2010, JEOL)

FE-SEM (JEOL-6700F, JEOL)

High resolution FE-SEM (SU8010, Hitachi)

Atmospheric plasma treatment (MyPL Auto-200)

Contact-angle analyzer (CAM-200)