Publications

SCI Journal Publications

16. J. Zou, C.-M. Lin, A. Gao, and A. P. Pisano, "The multi-mode resonance in AlN Lamb wave resonators," J. Microelectromech. Syst., vol. 27, no. 6, pp. 973-984, Dec. 2018. [Link] (SCI, 2017 Impact Factor: 2.475)

15. J. Zou, C.-M. Lin, G. Tang, and A. P. Pisano, "High-Q butterfly-shaped AlN Lamb wave resonators," IEEE Electron Device Lett., vol. 38, no. 12, pp. 1739-1742, Dec 2017. [Link] (SCI, 2017 Impact Factor: 3.433)

14. J. Zou, C.-M. Lin, C.S. Lam, and A. P. Pisano, "Transducer design for AlN Lamb wave resonators," J. Appl. Phys., vol. 121, no. 15, 154502, Apr. 2017. [Link] (SCI, 2017 Impact Factor: 2.176)

13. J. Zou, C.-M. Lin, Y.-Y. Chen, and A. P. Pisano, "Theoretical study of thermally stable SiO₂/AlN/SiO₂ Lamb wave resonators at high temperatures," J. Appl. Phys., vol. 115, no. 9, 094510, Mar. 2014. [Link] (SCI, 2014 Impact Factor: 2.183)

12. N. Zhang, C.-M. Lin, D. G. Senesky, and A. P. Pisano, "Temperature sensor based on 4H-silicon carbide pn diode operational from 25°C to 600°C," Appl. Phys. Lett., vol. 104, no. 7, 073504, Feb. 2014. [Link] (SCI, 2014 Impact Factor: 3.302)

11. C.-M. Lin, V. Yantchev, J. Zou, Y.-Y. Chen, and A. P. Pisano, "Micromachined one-port aluminum nitride Lamb wave resonators utilizing the lowest-order symmetric mode," J. Microelectromech. Syst., vol. 23, no. 1, pp. 78-91, Feb. 2014. [Link] (SCI, 2014 Impact Factor: 1.754)

10. C.-M. Lin, Y.-Y. Chen, V. V. Felmetsger, W.-C. Lien, T. Riekkinen, D. G. Senesky, and A. P. Pisano, "Surface acoustic wave devices on AlN/3C–SiC/Si multilayer structures," J. Micromech. Microeng., vol. 23, no. 2, 025019, Feb. 2013. [Link] (SCI, 2013 Impact Factor: 1.725) [Selected for IOPselect]

09. C.-M. Lin, Y.-Y. Chen, V. V. Felmetsger, D. G. Senesky, and A. P. Pisano, "AlN/3C–SiC composite plate enabling high-frequency and high-Q micromechanical resonators," Adv. Mater., vol. 24, no. 20, pp. 2722-2727, May 2012. [Link] (SCI, 2012 Impact Factor: 14.829) [Featured as the frontispiece]

08. C.-M. Lin, Y.-J. Lai, J.-C. Hsu, Y.-Y. Chen, D. G. Senesky, and A. P. Pisano, "High-Q aluminum nitride Lamb wave resonators with biconvex edges," Appl. Phys. Lett., vol. 99, no. 14, 143501, Oct. 2011. [Link] (SCI, 2011 Impact Factor: 3.844)

07. C.-M. Lin, Y.-Y. Chen, and A. P. Pisano, "Theoretical investigation of Lamb wave characteristics in AlN/3C–SiC composite membranes," Appl. Phys. Lett., vol. 97, no. 19, 193506, Nov. 2010. [Link] (SCI, 2010 Impact Factor: 3.820)

06. C.-M. Lin, W.-C. Lien, V. V. Felmetsger, M. A. Hopcroft, D. G. Senesky, and A. P. Pisano, "AlN thin films grown on epitaxial 3C–SiC (100) for piezoelectric resonant devices," Appl. Phys. Lett., vol. 97, no. 14, 141907, Oct. 2010. [Link] (SCI, 2010 Impact Factor: 3.820)

05. C.-M. Lin, T.-T. Yen, V. V. Felmetsger, M. A. Hopcroft, J. H. Kuypers, and A. P. Pisano, "Thermally compensated aluminum nitride Lamb wave resonators for high temperature applications," Appl. Phys. Lett., vol. 97, no. 8, 083501, Aug. 2010. [Link] (SCI, 2010 Impact Factor: 3.820) [Selected for Virtual Journal of Nanoscale Science & Technology, vol. 22, Sep. 6, 2010]

04. C.-M. Lin, T.-T. Yen, Y.-J. Lai, V. V. Felmetsger, M. A. Hopcroft, J. H. Kuypers, and A. P. Pisano, "Temperature-compensated aluminum nitride Lamb wave resonators," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol. 57, no. 3, pp. 524-532, Mar. 2010. [Link] (SCI, 2010 Impact Factor: 1.460) [Featured as the frontcover]

03. C.-M. Lin, T.-T. Wu, Y.-Y. Chen, and T.-T. Chou, "Improved frequency responses of SAW filters with interdigitated interdigital transducers on ZnO/Diamond/Si layered structure," J. Mech., vol. 23, no. 3, pp. 253-259, Sep. 2007. [Link] (SCI, 2007 Impact Factor: 0.722)

02. C.-M. Lin, Y.-Y. Chen, and T.-T. Wu, "A novel weighted method for layered SAW filters using slanted finger interdigital transducers," J. Phys. D: Appl. Phys., vol. 39, no. 3, pp. 466-470, Feb. 2006. [Link] (SCI, 2006 Impact Factor: 2.077)

01. T.-T. Wu and C.-M. Lin, "Analysis of SFIT SAW filters using coupling of modes model," J. Chin. Inst. Eng., vol. 27, no. 7, pp. 973-979, Nov. 2004. [Link] (SCI, 2004 Impact Factor: 0.208)

Peer-Reviewed Conference Publications

34. C.S. Lam, A. Gao, C.-M. Lin, and J. Zou, "A review of Lamé and Lamb mode crystal resonators for timing applications and prospects of Lamé and Lamb mode piezoMEMS resonators for filtering applications," in Proc. Int. Symp. Acoustic Wave Devices for Future Mobile Communication Systems, Chiba, Japan, Mar. 2018, pp. 2-13. [Invited paper]

33. J. Zou, J. Liu, G. Tang, C.-M. Lin, and C.S. Lam, "Transverse mode suppression in the AlN Lamb wave resonators by Piston Mode," in Proc. IEEE Int. Ultrason. Symp. (IUS), Washington, DC, Sep. 2017, pp. 1-4. [Link]

32. C.-M. Lin, J. Zou, Y.-Y. Chen, and A. P. Pisano, "High-Q piezoelectric Lamb wave resonators based on AlN plates with chamfered corners," in Proc. IEEE Int. Ultrason. Symp. (IUS), Taipei, Taiwan, Oct. 2015, pp. 1-4. [Link]

31. J. Zou, C.-M. Lin, Y.-Y. Chen, and A. P. Pisano, "High-frequency and low-resonance-impedance Lamb wave resonators utilizing the S1 mode," in Proc. Int. Conf. Solid-State Sens. Actuators Microsyst. (Transducers), Anchorage, AK, Jun. 2015, pp. 2025-2028. [Link]

30. J. Zou, C.-M. Lin, and A. P. Pisano, "Anchor loss suppression using butterfly-shaped plates for AlN Lamb wave resonators," in Proc. IEEE Int. Freq. Control Symp.–Eur. Freq. Time Forum (IFCS–EFTF), Denver, CO, Apr. 2015, pp. 432-435. [Link]

29. J. Zou, C.-M. Lin, and A. P. Pisano, "Quality factor enhancement in Lamb wave resonators utilizing butterfly-shaped AlN plates," in Proc. IEEE Int. Ultrason. Symp. (IUS), Chicago, IL, Sep. 2014, pp. 81-84. [Link]

28. A. Shankar, C.-M. Lin, C. Angadi, S. Bhattacharya, N. Broad, and D. G. Senesky, "Impact of gamma irradiation on GaN-on-sapphire SAW resonators," in Proc. IEEE Int. Ultrason. Symp. (IUS), Chicago, IL, Sep. 2014, pp. 2560-2563. [Link]

27. C.-M. Lin, J.-C. Hsu, D. G. Senesky, and A. P. Pisano, "Anchor loss reduction in AlN Lamb wave resonators using phononic crystal strip tethers," in Proc. IEEE Int. Freq. Control Symp. (IFCS), Taipei, Taiwan, May 2014, pp. 371-375. [Link]

26. Y.-Y. Chen, Y.-T. Lai, and C.-M. Lin, "Finite element analysis of anchor loss in AlN Lamb wave resonators," in Proc. IEEE Int. Freq. Control Symp. (IFCS), Taipei, Taiwan, May 2014, pp. 132-136. [Link]

25. A. Shankar, C. Angadi, S. Bhattacharya, C.-M. Lin, and D. G. Senesky, "Characterization of irradiated and temperature-compensated gallium nitride surface acoustic wave resonators," in Proc. SPIE Defense, Security, and Sensing (DSS), Baltimore, MD, May 2014, 91130B. [Link]

24. N. Zhang, C.-M. Lin, Y. Rao, D. G. Senesky, and A. P. Pisano, "4H-SiC pn diode for extreme environment temperature sensing applications," in Proc. SPIE Defense, Security, and Sensing (DSS), Baltimore, MD, May 2014, 911306. [Link]

23. Y.-J. Lai, W.-C. Li, C.-M. Lin, V. V. Felmetsger, D. G. Senesky, A. P. Pisano, "MEMS piezoelectric energy harvesters for harsh environment sensing," in Proc. Int. Workshop Structural Health Monitoring (IWSHM), Stanford, CA, Sep. 2013, pp. 2275-2282. [Link]

22. C.-M. Lin, Y.-Y. Chen, V. V. Felmetsger, D. G. Senesky, and A. P. Pisano, "Acoustic characteristics of the third-order quasi-symmetric Lamb wave mode in an AlN/3C–SiC plate," in Proc. Joint UFFC, EFTF and PFM Symp., Prague, Czech, Jul. 2013, pp. 1093-1096. [Link]

21. J. Zou, C.-M. Lin, D. G. Senesky, and A. P. Pisano, "Thermally stable SiO₂/AlN/SiO₂ Lamb wave resonators utilizing the lowest-order symmetric mode at high temperatures," in Proc. Joint UFFC, EFTF and PFM Symp., Prague, Czech, Jul. 2013, pp. 1077-1080. [Link]

20. Y.-J. Lai, W.-C. Li, C.-M. Lin, V. V. Felmetsger, and A. P. Pisano, "High-temperature stable piezoelectric aluminum nitride energy harvesters utilizing elastically supported diaphragms," in Proc. Int. Conf. Solid-State Sens. Actuators Microsyst. (Transducers), Barcelona. Spain, Jun. 2013, pp. 2268-2271. [Link] [Best poster award]

19. C.-M. Lin, Y.-Y. Chen, V. V. Felmetsger, D. G. Senesky, and A. P. Pisano, "Two-port filters and resonators on AlN/3C–SiC plates utilizing high-order Lamb wave modes," in Proc. IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS), Taipei, Taiwan, Jan. 2013, pp. 789-792. [Link]

18. C.-M. Lin, Y.-Y. Chen, V. V. Felmetsger, D. G. Senesky, and A. P. Pisano, "Dispersion characteristics of high-order Lamb wave modes in an AlN/3C–SiC layered plate," in Proc. IEEE Int. Ultrason. Symp. (IUS), Dresden, Germany, Oct. 2012, pp. 531-534. [Link]

17. Y.-J. Lai, W.-C. Li, C.-M. Lin, V. V. Felmetsger, D. G. Senesky, and A. P. Pisano, "SiC/AlN piezoelectric energy harvesters for pulsed pressure sources in harsh environment applications," in Proc. Solid-State Sens. Actuators Microsyst. Workshop (Hilton Head), Hilton Head, SC, Jun. 2012, pp. 505-508. [Link]

16. C.-M. Lin, Y.-Y. Chen, V. V. Felmetsger, G. Vigevani, D. G. Senesky, and A. P. Pisano, "Micromachined aluminum nitride acoustic resonators with an epitaxial silicon carbide layer utilizing high-order Lamb wave modes," in Proc. IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS), Paris, France, Jan. 2012, pp. 733-736. [Link]

15. C.-M. Lin, T.-T. Yen, V. V. Felmetsger, J. H. Kuypers, and A. P. Pisano, "Intrinsic characteristics of thermally stable AlN Lamb wave resonators at high temperatures," in Proc. IEEE Int. Ultrason. Symp. (IUS), Orlando, FL, Oct. 2011, pp. 2078-2081. [Link]

14. C.-M. Lin, Y.-J. Lai, T.-T. Yen, J.-C. Hsu, Y.-Y. Chen, D. G. Senesky, and A. P. Pisano, "Quality factor enhancement in Lamb wave resonators utilizing AlN plates with convex edges," in Proc. Int. Conf. Solid-State Sens. Actuators Microsyst. (Transducers), Beijing, China, Jun. 2011, pp. 1512-1515. [Link]

13. C.-M. Lin, V. Yantchev, Y.-Y. Chen, V. V. Felmetsger, and A. P. Pisano, "Characteristics of AlN Lamb wave resonators with various bottom electrode configurations," in Proc. IEEE Int. Freq. Control Symp.–Eur. Freq. Time Forum (IFCS–EFTF), San Francisco, CA, May 2011, pp. 505-509. [Link]

12. C.-M. Lin, Y.-Y. Chen, V. V. Felmetsger, T.-T. Yen, W.-C. Lien, D. G. Senesky, and A. P. Pisano, "Surface acoustic wave propagation properties in AlN/3C–SiC/Si composite structure," in Proc. IEEE Int. Ultrason. Symp. (IUS), San Diego, CA, Oct. 2010, pp. 1696-1699. [Link]

11. T.-T. Yen, C.-M. Lin, M. A. Hopcroft, J. H. Kuypers, D. G. Senesky, and A. P. Pisano, "Synthesis of narrowband AlN Lamb wave ladder-type filters based on overhang adjustment," in Proc. IEEE Int. Ultrason. Symp. (IUS), San Diego, CA, Oct. 2010, pp. 970-973. [Link]

10. G. Vigevani, R. J. Przybyla, T.-T. Yen, C.-M. Lin, A. Guedes, J. H. Kuypers, B. E. Boser, D. A. Horsley, and A. P. Pisano, "Characterization of a single port aluminum nitride tuning fork," in Proc. IEEE Int. Ultrason. Symp. (IUS), San Diego, CA, Oct. 2010, pp. 1281-1284. [Link]

09. C.-M. Lin, W.-C. Lien, T.-T. Yen, V. V. Felmetsger, D. G. Senesky, M. A. Hopcroft, and A. P. Pisano, “Growth of highly c-axis oriented AlN films on 3C-SiC/Si substrate,” in Proc. Solid-State Sens. Actuators Microsyst. Workshop (Hilton Head), Hilton Head, SC, Jun. 2010, pp. 324-327. [Link]

08. C.-M. Lin, T.-T. Yen, V. V. Felmetsger, M. A. Hopcroft, J. H. Kuypers, and A. P. Pisano, "Thermal compensation for aluminum nitride Lamb wave resonators operating at high temperature," in Proc. IEEE Int. Freq. Contr. Symp. (IFCS), Newport Beach, CA, Jun. 2010, pp. 14-18. [Link]

07. T.-T. Yen, C.-M. Lin, Y.-J. Lai, D. Wittwer, M. A. Hopcroft, and A. P. Pisano, "Fine frequency selection technique for aluminum nitride Lamb wave resonators," in Proc. IEEE Int. Freq. Contr. Symp. (IFCS), Newport Beach, CA, Jun. 2010, pp. 9-13. [Link]

06. T.-T. Yen, C.-M. Lin, X. Zhao, V. V. Felmetsger, D. G. Senesky, M. A. Hopcroft, and A. P. Pisano, "Characterization of aluminum nitride Lamb wave resonators operating at 600°C for harsh environment RF applications," in Proc. IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS), Hong Kong, China, Jan. 2010, pp. 731-734. [Link]

05. Y.-M. Chen, M. Sheppy, T.-T. Yen, G. Vigevani, C.-M. Lin, J. H. Kuypers, M. A. Hopcroft, and A. P. Pisano, "Bi-chevron aluminum nitride actuators for high pressure microvalves," in Proc. Eurosensors XXIII, Lausanne, Switzerland, Sep. 2009, pp. 706-709. [Link]

04. C.-M. Lin, T.-T. Yen, Y.-J. Lai, V. V. Felmetsger, M. A. Hopcroft, J. H. Kuypers, and A. P. Pisano, "Experimental study of temperature-compensated aluminum nitride Lamb wave resonators," in Proc. Eur. Freq. Time Forum – IEEE Int. Freq. Contr. Symp. (EFTF–IFCS), Besançon, France, Apr. 2009, pp.5-9. [Link]

03. J. H. Kuypers, C.-M. Lin, G. Vigevani, and A. P. Pisano, "Intrinsic temperature compensation of aluminum nitride Lamb wave resonators for multiple-frequency references," in Proc. IEEE Int. Freq. Contr. Symp. (IFCS), Honolulu, HI, May 2008, pp. 240-249. [Link] [Invited paper]

02. Y.-Y. Chen, C.-M. Lin, and T.-T. Wu, "A novel weighted method for wide-band SAW filters using slanted finger interdigital transducers on layered piezoelectric substrates," in Proc. IEEE Int. Ultrason. Symp. (IUS), Rotterdam, The Netherlands, Sep. 2005, pp. 2182-2185. [Link]

01. T.-T. Wu and C.-M. Lin, "Analysis of SFIT SAW filters using coupling of modes model," in Proc. Conf. Nano Eng. Micro Syst. Tech., Taipei, Taiwan, Nov. 2003, pp. 209-212. [Link]

Patents

08. C.-M. Lin, J. Zou, T. Jibu, and C.S. Lam, "Lamb wave element and bulk acoustic wave resonator on common substrate," submitted to USPTO, US16/287,891, Feb 27, 2019.

07. C.-M. Lin, J. Zou, T. Jibu, and C.S. Lam, "Lamb wave loop circuit for acoustic wave filter," submitted to USPTO, US16/287,802, Feb 27, 2019.

06. J. Zou, J. Liu, G. Tang, C.-M. Lin, and C.S. Lam, "Piston mode Lamb wave resonators," US Patent, US 10,873,313 B2, granted on Dec. 22, 2020. [Link]

05. C.-C. Chou and C.-M. Lin, "Fluid injection devices with sensors, fluid injection system and method of analyzing fluid in fluid injection devices," US Patent, US 7,578,583 B2, granted on Aug. 25, 2009. [Link]

04. C.-C. Chou, W. Wang, and C.-M. Lin, "Microfluid injecting devices capable of inspecting and monitoring nozzle process on a real time basis and related methods," TW Patent, No. I288704, granted on Oct. 21, 2007.

03. C.-C. Chou and C.-M. Lin, "Surface acoustic wave driven fluid injection devices," TW Patent, No. I265097, granted on Nov. 1, 2006.

02. C.-C. Chou and C.-M. Lin, "Fluid injection devices with sensors, fluid injection system and method of analyzing fluid in fluid injection devices," TW Patent, No. I265096, granted on Nov. 1, 2006.

01. T.-T. Wu, C.-M. Lin, and Y.-Y. Chen, "Layered SAW devices using slanted finger interdigital transducers," TW Patent, No. I231647, granted on Apr. 21, 2005.

Degree Theses

03. C.-M. Lin, "Temperature-compensated and high-Q piezoelectric aluminum nitride Lamb wave resonators for timing and frequency control applications," Ph.D. Dissertation, Department of Mechanical Engineering, University of California, Berkeley, CA, USA, May 2013.

02. C.-M. Lin, "Temperature compensation of aluminum nitride Lamb wave resonators utilizing the lowest-order symmetric mode," M.S. Thesis, Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, CA, USA, Dec. 2012.

01. C.-M. Lin, "Analysis of RF wide band layered SAW filter using slanted finger interdigital transducer," M.S. Thesis, Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan, Jun. 2003. [Selected for the Best Master's Thesis in 2003 by the National Science Council of Taiwan]