Average power at minimum specified bandwidth : > 750 mW
Average power at 60 nm bandwidth : > 450 mW
Bandwidth : 10 - 60 nm
Tuning range : 780 - 820 nm
Repetition rate : 84 MHz
Electron-Beam evaporator 6 sockets (Tungsten crucible) : Cr
Thermal evaporator Tungsten boat : Cr, Au, Ag
Temperature range : 25 - 250℃
Temperature range : 25 - 400℃
Sample chuck size : 30 mm
Rotation speed : 1,500 Hz
Final pressure : < 1x10⁻⁷ mbar