Thin-film Growth
Thin-film Growth
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Post date: Apr. 27, 2025
Pulsed Laser Deposition (PLD)
COMPex 102F
PLD chamber diagram
Tube Furnace
Lindberg/Blue M™ 1200°C Split-Hinge Tube Furnaces
가열영역: 12 in.
온도(미터법): 100 to 1200°C
유형:Multisegment
디스플레이:LED
온도 제어:Independant CC58114C
Film Fabrication System (RF Sputtering)
RF sputter (home made)
Pressure: Max 10-6 ~ 10-7 Torr
Gun#1: 2 inch on-axis gun
Gun#2: 1.5 inch off-axis gun
Power Range: 1~300W
Multi gun Sputter (home made)
Pressure: Max 10-6 ~ 10-7 Torr
Gun: 2 inch on-axis gun 5EA
Power Range: 1~300W
Turbo Molecular pump & power supply (TG450F/ 8)
Pressure: Max 10-6 ~ 10-7 Torr
Inlet Flange type: VG150 / ISO-B160/CF160
Max. throughput (sccm) : 500
Position: Any orientation
controller: TC353
Home Made
Pressure: Max 10-6 ~ 10-7 Torr
RF GENERATOR : YSR-06MF (YOUNGSIN RF.)
Output frequency 13.56MHz(주파수 안정도 : ±0.005%)
RF Power Output Max 600W @ 50 ohm., AC 입력 220Vac/단상 50-60Hz
E-beam
SHE-6T-3500 (Electron Beam Evaporation)
Pressure: Max 10-6 10-7 Torr
Acceleration Voltage : 4~10kV
Filament Current : 50A @ 10VAC
Beam Deflection: 270°
최대 출력: 6 kW
Applications: 박막 증착(Thin Film coating)
Glad E-beam evaporator (home made)
Pressure: Max 10-6 10-7 Torr
Substrate Angle: 0 ~ 90°
AC Current: 4A
DC Sputtering System
Home made
Pressure: Max 10-6 ~ 10-7 Torr
4" Target
DC Power Supply : D1313(SAM WON VACUUM CO., LTD.)
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