Equipment/Facilities

Plasma-Enhanced CVD system
(퍼블)

CVD system
(싸이엔텍)

Fume Hood & Sink

Semiconductor Parameter Analyzer
(Keithley 4200A-SCS)

Oscilloscope
(Tektronix MDO34)

System Electrometer
(Keithley 6514)

Probe Station
(MS TECH MST4000A)

Laser Marking Machine
(Sol Laser SCT30)

Spin Coater
(MIDAS SPIN-1200D)

UV Ozone Cleaner
(Ossila)

Water Purification System
(Human New Pure RO)

Thermal Evaporator

Optic microscope

Oven
(JEIO TECH OF-02)

Lab.