Equipment/Facilities

Plasma-Enhanced CVD system
(퍼블)

CVD system
(싸이엔텍)

Fume Hood & Sink

Oven
(JEIO TECH OF-02)

Laser Marking Machine
(Sol Laser SCT30)

Spin Coater
(MIDAS SPIN-1200D)

UV Ozone Cleaner
(Ossila)

Water Purification System
(Human New Pure RO)

Thermal Evaporator

Probe Station
(MS TECH MST4000A)

Optic microscope

Potentiostat
(Autolab PGSTAT204)

Semiconductor Parameter Analyzer
(Keithley 4200A-SCS, 4225-PMU, 4215-CVU)

Oscilloscope
(Tektronix MDO34)

System Electrometer
(Keithley 6514)

PXI System
(National Instruments)

CompactDAQ
(National Instruments)

4 Point System
(MS Tech M4P302)