Equipment/Facilities
Plasma-Enhanced CVD system
(퍼블)
CVD system
(싸이엔텍)
Fume Hood & Sink
Semiconductor Parameter Analyzer
(Keithley 4200A-SCS)
Oscilloscope
(Tektronix MDO34)
System Electrometer
(Keithley 6514)
Probe Station
(MS TECH MST4000A)
Laser Marking Machine
(Sol Laser SCT30)
Spin Coater
(MIDAS SPIN-1200D)
UV Ozone Cleaner
(Ossila)
Water Purification System
(Human New Pure RO)
Thermal Evaporator
Optic microscope
Oven
(JEIO TECH OF-02)
Lab.