Plasma Etcher Equipment
We study plasma sources for the fabrication of future semiconductor chips and process monitoring devices.
AI and deep learning algorithms for the prediction of plasma process are also focused on.
# Monitoring of plasma spatial distribution using optical sensors
# Analysis of electromagnetic characteristics of plasma equipment
Atmospheric/Liquid Plasma System
We develop devices that can generate plasma in atmospheric or liquid environments for material treatment and synthesis.
We apply monitoring and control systems to these plasma devices to sustain plasma quality.
Industrial Equipment
We support the development of key technologies for industrial equipment such as metal 3D printers and nano powder synthesis equipment, including monitoring, process optimization, and analysis.