We study industrial plasma equipment technologies for semiconductor fabrication process (especially, dry etch) with the aim of improving the process quality of the equipment. We are also interested in developing monitoring devices of plasma characteristics.
We cover mechanical design, electrical design of the equipment using simulation tools such as HFSS, COMSOL, and process prediction model using machine leanring including deep neural network.
[Notice]
한국기술교육대학교 IPE Lab 에서 함께 연구할 대학원생 (석사, 박사 과정)을 모집합니다. 관심 있는 학생은 교수님 이메일로 연락 바랍니다.
APiE Lab @ KOREATECH is looking for graduate students (M.S. and Ph.D.). Students who would like to join IPE Lab contact Prof. Kwon via email.