Simulation and Modeling

Piezoelectric Micromachined Ultrasound Transducers (PMUTs) can potentially lead to next major improvement in ultrasound imaging technology due to their low-voltage operation, and low cost batch fabrication. Unlike bulk transducers, PMUTs operate though flexural mode of operation of a multilayered plate structure released on a silicon substrate. I approached the problem of PMUT design from a systems level perspective and formulated simplified lumped models that can give a reasonably good approximation of PMUT performance while proving clear insights about scaling of design in lateral and transverse directions. These insights were corroborated first through rigorous FEM models in Comsol and later also through fabrication and characterization of multiple batches of PMUTs. This work will serve as a useful guideline to make better MEMS ultrasound transducers in future.

• Dangi, A., & Pratap, R. (2017). System level modeling and design maps of PMUTs with residual stresses. Sensors and Actuators, A: Physical, 262, 18–28. https://doi.org/10.1016/j.sna.2017.05.006.
• Dangi, A., Singh, R., Deshmukh, D., & Pratap, R. (2016). Dynamics of strongly coupled fluid-filled micro-cavities and PMUTs in integrated microfluidic devices. In Proceedings of the ASME Design Engineering Technical Conference (Vol. 4). https://doi.org/10.1115/DETC2016-59910.pdf
• Behera, A. R., Dangi, A., & Pratap, R. (2018). An Experimental Study of Residual Stress Induced Modulation of Vibration Characteristics in 1-D MEMS Resonators. Materials Performance and Characterization, 7(4), 20170156. https://doi.org/10.1520/mpc20170156