The analysis chamber of SmartLab system hosts a conventional XPS setup composed by a monochromatised Al Ka x-ray source and a hemispherical electrostatic analyser.
The X-Ray source is a XR-MF50 by Specs, achieving the following target
Photon energy: 1486.67 eV
X-ray source energy resolution: 1.22 meV FWHM
Count rate: 500 kcps @ 1 eV FWHM resolution on Ag (poly) 3d5/2
Spot size: 270 microns
This chamber is also equipped with a Flood gun for charge compensation in insulating specimens.
Electron energy: 0-500 eV
Electron emission current: 1uA - 5 mA
A hemispherical electron analyser PHOIBOS 150 is used to analyse the kinetic energy of the emitted electrons
CMOS detector Flir Camera
Energy resolution: 5.3 meV FWHM @ 1.5 eV pass energy on Xe 5p3/2
Different lens modes: Large/Medium/small area; Angular resolution and High Magnification (mapping)
Variable Iris for energy and spatial resolution
Selectable exit and entrance slits to tune both energy and spatial resolution
An external camera allows for visual inspection of the sample
An example of spatial resolved measurements.
Au mesh- hole width: 58µm; bar width 25µm; rim width 225µm; dia. 3.05mm