Geophysical Sciences 

FIB-SEM 

Figure: The LYRA3 at the University of Chicago.

FIB-SEM

The FIB-SEM facility in the Department of the Geophysical Sciences at the University of Chicago features a TESCAN LYRA3 field-emission scanning electron microscope (FESEM) with a focused ion beam (FIB). 

SEM

The SEM can operate at high vacuum for conducting samples or coated insulators and at low vacuum for insulating samples, and is equipped with the following detectors and other capabilities:

SEM applications

FIB

The LYRA3 is equipped with a Cobra liquid metal ion gun that emits a focused beam of gallium ions. The current of the gallium beam can be varied between ~30 nA and <1 pA. It is currently used for milling, imaging, and controlled deposition of carbon and platinum. The latter is achieved using an Oxford Instruments OmniGIS II gas injection system. An Oxford Instruments OP-400 micromanipulator can be used to lift out small milled samples. The OmniGIS II is currently set up for carbon and platinum deposition, but can also be equipped for deposition of tungsten, and for enhanced milling with reactive gases (XeF2 for SiO2 and H2O for carbon).

FIB applications

Want to use the FIB-SEM?

We welcome users from within and outside of the university. Rates vary based on application and user level. We offer training, operator-assisted and independent use of the instrument. Contact us at FIBSEM-manager@uchicago.edu for more details or to schedule a session.

Figure: Example of a BSE image and elemental maps obtained with the LYRA3 and Oxford instruments EDS detector at the University of Chicago (modified from Kööp et al., 2016).