Facilities

Micro Raman Spectrometer Coupled with Four Probe Surface Probe Microscopy

Raman Spectrometer

• Micro-Raman Spectrometer (Renishaw inVia)
• Excitations 325, 488, 514.5 and 785 nm
• Detection Limit 200-1700 nm Raman Imaging for 100 nm resolution (Point Source : Slow Scan) and 600 nm resolution (Line Source : Fast Scan)
• Temperature 77-600 K on Raman Stage (LN₂ Cooled)

Surface Probe Microscopy (SPM)

• Four Probe with Independent Tuning Fork Feed Back ( MV4000, Nanonics, Israel)
• One probe with Beam Bounce Feed Back
• Max Scanning Range 150x150x150 micrometer
• Tip Enhance Raman Spectroscopy (TERS)
• Near-Field Scanning Optical Microscopy with Single Photon Detector
• Conductance Mapping, Kelvin Probe Microscopy, Magnetic Force Microscopy
• Thermal Scanning
• Nanoindentation
• Nano-delivery (Gas, Liquid)
• 1E-7 mbar (ion pump and Turbo pump)
• Temperature -25-300 ^oC on SPM Stage (Thermoelectric Cooled)

CVD Chamber for Vapour-Liquid-Solid Growth

• MFC controlled Gas Injection Port.
• Pressure : 0.001-1200 mBar (Strain Gauge Sensor) Max.
• Temperature 1473 K

Three Zone Tube Furnace

• (80 O.D x 74 ID. x 1400 L) mm fused quartz tube;
• Max. Temperature 1475 K;
• Three zones: (660mm in total), each zone 220mm heating length

Thermal Evaporation Unit

• Resistive Heating
• Diffusion pump backed by rotary pump
• Digital Thickness Monitor
• Chamber Vacuum 1 x 10^-6

Double Barrier LB trough

Used for monolayer and multilayer deposition of organic tailored thin films for microelectronics, sensor applications.

Exposure Facility for Gas Sensing (EFGS)

• Resistance based Gas Sensor Studies
• Indigenously designed
• Sensors in various forms can be tested (nanostructures, thin films, thick films, devices etc)
• Testing upto 600 ^oC in dynamic mode
• MFC based gas switching facility controlled through PLC circuitry
• Upto 6 gas flows can be flown simultaneously with completely electro-pneumatic opening/closing of valves
• Automated data acquisition (resistance, RGA profiles)

Exposure Facility for Chemical Sensing

• Resistance/capacitive based Chemical Sensor Studies
• Indigenous designed
• Sensors in various forms can be tested (nanostructures, thin films, thick films, devices etc)
• Testing upto 400 ^oC in static mode

Micro Probe Station for Optoelectronic Measurements