1) Manufacturing Facilities
Laser marking machine (60W laser)
Polymer/Metal 3D Printers at Shared Facilities
High current power supply (15V/50A), (48V/13A) &(30V/10A)
Air/Ball bearing spindles (Dover Instruments, Guzik)
Precision linear stages (10nm resolution, Parker Inc.)
Air bearing linear slides (300 mm stroke, Aerotech)
Precision XY nanopositioners (Lab-built)
Precision XY, XYZ CNC routers
XYZ routers, Hot-stamping machine, Vacuum chamber
Laser marking machine (50W)
2) Metrology Facilities
Wafer inspection stage (lab-built)
White light interferometry (Zygo Gauge, 3D microscope) at Shared Facilities
Infrared microscope
Electrochemical impedance spectroscopy (4192a)
Lock-in amplifiers (SRS 830/845)
Laser interferometer set (Agilent)
IR Spectrometer (1000-2500nm)
VIR Spectrometers (200-1200nm)
SEM at Shared Facilities
Surface profiler (KLA-Tencor) at Shared Facilities
Optical microscopes
Dynamic signal analyzer (DSA, 4 Channel Agilent 35670a)
XY flexure mechanisms (PZT actuators, cap probes, strain-gauge sensors)
3) Lasers
Stabilized fiber laser (1550nm, Thorlabs)
Fiber laser (540nm, 635nm, 650nm, Thorlabs)
Stabilized He-Ne laser (623.8nm): Coherent Inc, Thorlabs Inc.
Stabilized He-Ne lasers (632.8nm): REO
Laser diodes (407nm, 520nm, 650nm)
4) Sensors
Laser displacement sensors (Keyence, LK-G30)
Capacitive type sensors (Lion Precision, Capacitec, ADE Technologies)
Force sensors (Kistler 9201 + 1-axis charge amplifier, load cells)
Optical pyrometers (350C, 1600C)
Light power meter (Newport Inc)
Digital dial gauges (1um resolution)
Accelerometers (PCB Electronics Inc., Kistler)
Photodetectors (Newport Inc, Measurement Specialist Inc. Hamamatsu Corp.)
Ferromaster (magnetic permeability tester)
5) Actuators
PZT actuators with driver (0.3nm resolution, PI Inc.)
Voice coil motors (Moticont)
BLDC motor drivers 750/600W/1kW/2kW
XY Galvanometer (closed controlled)
6) Data Acquisition/Control Units
UMAC (Detal Tau Inc., ADC, 4ch Interpolator)
LabView Daq (USB6343, 4 units)
NI cRio ( 8 channels)
Oscilloscopes (Tektronix, BK Precision)
Function generators (BK Precision, Keysight, NF Waveform)
7) Software
Ansys, Abacus
Autodesk, Solidworks, PCT
Matlab, MathCad, Mathematica
NI LabView
If you have any assistance, please contact me (MEOB 320) or visit to JCain 313/437.