• Scalable micro/nano-manufacturing: 2D and 3D patterning

• Thermal management for packaging

Facilities & techniques

• 3D printers at microscale (1-100 µm) and nanoscale (100nm - 1µm) resolution

• 2D maskless patterning at microscale (1-100 µm) and nanoscale (10nm - 1µm) resolution

• General lasers, optics, plasmonics and photonics 

• MEMS and NEMS design and fabrication

• Multiphysics modeling and co-design (thermal, optical, mechanical, fluid, electrical, chemical, magnetic, etc.)

• FPGA programming for high-speed realtime control

• Air bearing surface (ABS) design and implementation for hard disk drive and journal bearing

• Heat pipe design, fabrication and testing

• Tools for hot press, vacuum thermal/UV curing, spin coating, glovebox, etc.