STUDENTS
STUDENTS
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Eun-Su Chung (Internship since 2024)
Eun-Su Chung (Internship since 2024)
Research Area : Low-resistivity metal ALD
Office : Engineering Building 5, RM #330
E-Mail : cesces114@naver.com
Birth date : 2001.01.14
Education
Education
M.S. & Ph.D. Integrated Course in Materials Science and Chemical Engineering (2025.03 -)
M.S. & Ph.D. Integrated Course in Materials Science and Chemical Engineering (2025.03 -)
Hanyang University, Ansan, Korea
Research advisor : Professor Ji-Hoon Ahn
B. S. in Department of Materials Science and Chemical Engineering (2019. 03 - 2025. 02)
Hanyang University, Ansan, Korea
Publications
Publications
1. "Effect of H2/N2 ratio on molybdenum nitride thin films deposited by plasma-enhanced atomic layer deposition: Applications for next-generation interconnects"
1. "Effect of H2/N2 ratio on molybdenum nitride thin films deposited by plasma-enhanced atomic layer deposition: Applications for next-generation interconnects"
ACS Applied Nano Materials, 8(25), 13130-13138 (2025).
Min-Ji Ha, Na-Gyeong Kang, Eun-Su Chung, Ji-Hoon Ahn*
Conferences
Conferences
1. "Plasma Enhanced Atomic layer deposition of MoCX thin films using a newly synthesized liquid Mo precursor" - Domestic
The 32nd Korean Conference on Semiconductors (KCS 2025), Korea
Eun-Su Chung, Min-Ji Ha, Na-Gyeong Kang, and Ji-Hoon Ahn*
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