Scientific Reports: Nano-artifact metrics

Post date: Aug 21, 2014 9:37:01 AM

A new paper has been published in Scientific Reports.

T. Matsumoto, M. Hoga, Y. Ohyagi, M. Ishikawa, M. Naruse, K. Hanaki, R. Suzuki, D. Sekiguchi, N. Tate, and M. Ohtsu: Nano-artifact metrics based on random collapse of resist, Scientific Reports, Vol. 4, Article No. 6142, August 2014.