I carry out a Ph.D in Electrical and Computer Engineering at Carnegie Mellon University.I have been working in the areas of RF MEMS, acousto-electronic technology including resonators and filters, piezoelectric materials including Lithium niobate (LN) and Aluminum nitride (AlN) and MEMS-enabled IC design since 2010. Work has included research, fabrication and development at a variety of levels including mechanical computing, Finite element analysis (FEA) based simulation, device design and circuits. Research has been sponsored by NSF, DARPA, and Samsung funds.
l DARPA RF-FPGA project, team leader, Jul. 2012 – present, Carnegie Mellon Univ., led in developing the 2nd generation LN laterally vibrating resonators (LVRs) and field-programmable filters (enable multiple frequencies on the single chip, bandwidth tuning, filter order selection and temperature compensation(~ 0 ppm/˚C achieved))
l Designed and optimized MEMS Resonator and peripheral circuits for filtering implementation
l Developed technology platform for engineering the Temperature Coefficient of Frequency of LN resonators
l Innovated resonator design enabling: (i) a considerable improvement of kt 2 (2X improvement), (ii) significant spurious mode suppression, and robustness to processing (iii) misalignment and (iv) over/under-etching.
l Developed, optimized and implemented fabrication process for LN/SiO2/LN and LN/SiO2/Si platform
l Implemented RF characterization, testing & fitting
l DARPA MiNaSIP project, Sep.2010-Jul.2012, Univ. of Pennsylvania, took charge of design, fabrication and demonstration of 1st generation of LN MEMS resonator (achieved 10X enhancement of coupling factor (kt2 ~ 15-20%) compared to AlN resonators and hence greatly increase filter bandwidth)
l Designed the first prototype of LN LVRs
l Developed computing method/code to calculate piezoelectric parameters for LN of different orientations
l Developed fabrication process including critical step such as Cl2 based etching recipe for LN resonator and bonding process for LN on LN through BC