Embedded Files
Block Copolymer Directed Self-Assembly (DSA) is a promising technique to print contacts/vias for the 10nm technology node and beyond. By using hybrid lithography that incorporates DSA with multiple patterning, multiple masks are used to print the DSA templates and then the templates can be used to guide the self-assembly of the block copolymer. In this work, we propose approaches to solve the simultaneous template optimization and mask assignment problem for DSA with multiple patterning. We verified in experiments that our approaches remarkably outperform the state of the art work in reducing the manufacturing cost.
Block Copolymer Directed Self-Assembly (DSA) is a promising technique to print contacts/vias for the 10nm technology node and beyond. By using hybrid lithography that incorporates DSA with multiple patterning, multiple masks are used to print the DSA templates and then the templates can be used to guide the self-assembly of the block copolymer. In this work, we propose approaches to solve the simultaneous template optimization and mask assignment problem for DSA with multiple patterning. We verified in experiments that our approaches remarkably outperform the state of the art work in reducing the manufacturing cost.
This work received the best paper award nomination from ASP-DAC 2016.
This work received the best paper award nomination from ASP-DAC 2016.
To compare or to use these benchmarks, please cite the following paper:
To compare or to use these benchmarks, please cite the following paper:
Jian Kuang, Junjie Ye and Evangeline F.Y. Young,
Jian Kuang, Junjie Ye and Evangeline F.Y. Young,
"Simultaneous Template Optimization and Mask Assignment for DSA with Multiple Patterning",
"Simultaneous Template Optimization and Mask Assignment for DSA with Multiple Patterning",
IEEE/ACM Asia and South Pacific Design Automation Conference (ASP-DAC), Jan. 25 – 28, 2016.
IEEE/ACM Asia and South Pacific Design Automation Conference (ASP-DAC), Jan. 25 – 28, 2016.
Google Sites
Report abuse