Scanning strategy-dependent etching rate in the formation of through-via holes by femtosecond laser-assisted etching, Shogo Matsuda and Shigeki Matsuo, Japanese Journal of Applied Physics 63(5), 052001 (2024). DOI: 10.35848/1347-4065/ad3da2 (Open Access)
Anisotropic reversing motion in laser-induced periodic surface structures, Ryoji Kato and Shigeki Matsuo, Applied Physics Express 16(8), 082002 (2023). DOI: 10.35848/1882-0786/acea19 (Open Access)
Activation energy of kink incorporation of particles into colloidal crystals with attractive interactions, Masahiro Kanno, Yutaka Tsuboi, Shigeki Matsuo, and Yoshihisa Suzuki, CrystEngComm 25, 1828-1832 (2023). DOI: 10.1039/D2CE01524B
Short and ultrashort pulsed laser-based micro-scribing of copper film on a dielectric substrate for functional devices, S. Sooraj, Y. R. Yugandhara, N. J. Vasa, A. Kavitha, S. Krishnan, S. Matsuo, Applied Physics A 128(11), 1031 (2022). DOI: 10.1007/s00339-022-06181-w
Pulse-by-pulse optical observation of laser-irradiated thin glass substrate using oil-immersion microscopy, Yuta Yanagisawa and Shigeki Matsuo, Japanese Journal of Applied Physics 61(1), 010901 (2022). DOI: 10.35848/1347-4065/ac4034 (Open Access)
Nanosecond and sub-nanosecond laser-assisted microscribing of Cu thin films in a salt solution, Sooraj Shiby, Nilesh J Vasa, Matsuo Shigeki, Journal of Micromanufacturing 4(2), 138-146 (2021). DOI: 10.1177/25165984211008168
Inscribing diffraction grating inside silicon substrate using a subnanosecond laser in one photon absorption wavelength, Kozo Sugimoto, Shigeki Matsuo, and Yoshiki Naoi, Scientific Reports 10, 21451 (2020). DOI: 10.1038/s41598-020-78564-z (Open Access)
Pulse-by-Pulse Optical Observation of Growth of Laser-Induced Periodic Surface Structure at Oblique Incidence, Kyosuke Shibata and Shigeki Matsuo, Journal of Laser Micro/Nanoengineering 15(2), 128-131 (2020). DOI: 10.2961/jlmn.2020.02.2009 (Open Access)
Pulsed Laser-Based Hybrid Microscribing of Cu and Al in Salt Solution, Sooraj Shiby, Nammi Srinagalakshmi, Nilesh J. Vasa, Shigeki Matsuo, Journal of Micro and Nano-Manufacturing 8(3), 031002 (2020). DOI: 10.1115/1.4046854
Water-Assisted Laser Drilling for Miniature Internal Thread in Glass and Evaluation of Its Strength, Reo Murakami, Hiroyuki Nakagawa, and Shigeki Matsuo, Journal of Laser Micro/Nanoengineering 12(3), 203-206 (2017). DOI: 10.2961/jlmn.2017.03.0005 (Open Access)
High-spatial-frequency periodic surface structures on steel substrate induced by subnanosecond laser pulses, Kyosuke Haruki Hikage, Nami Nosaka, and Shigeki Matsuo, Applied Physics Express 10(11), 112701 (2017). DOI: 10.7567/APEX.10.112701 (Open Access)
Removal Processing inside PDMS by Short Pulse Laser, Katsuyuki Hayashi and Shigeki Matsuo, Journal of Laser Micro/Nanoengineering 12(2), 141-145 (2017). DOI: 10.2961/jlmn.2017.02.0016 (Open Access)
Laser Fabrication of Miniature Internal Thread in Glass Substrate, Hiroyuki Degawa, Noriaki Urano, and Shigeki Matsuo, Micromachines 8(2), 48 (2017). DOI: 10.3390/mi8020048 (Open Access)
Subnanosecond-laser-induced periodic surface structures on prescratched silicon substrate, Motoharu Hongo and Shigeki Matsuo, Applied Physics Express 9(6), 062703 (2016). DOI: 10.7567/APEX.9.062703
Spontaneous formation of 10-μm-scale periodic patterns in transverse-scanning femtosecond laser processing, Shigeki Matsuo and Shuichi Hashimoto, Optics Express 23(1), 165-171 (2015). DOI: 10.1364/OE.23.000165 (Open Access)
High-frame-rate observation of single femtosecond laser pulse propagation in fused silica using an echelon and optical polarigraphy technique , Xiaofang Wang, Lihe Yan, Jinhai Si, Shigeki Matsuo, Huailiang Xu, and Xun Hou, Applied Optics 53(36), 8395-8399 (2014). DOI: 10.1364/AO.53.008395
Possibility of fabricating tetragonal periodic surface structures using circularly-polarized laser pulses, Keisuke Fukuhara and Shigeki Matsuo, 30 September 2024, 17th International Conference on Laser Ablation (COLA2024) (Crete, Greece), 45.
Laser-induced Local Nitridation of Aluminum in Hydrogen-Mixed Nitrogen Gas, Haruto Mizuno, Shigeki Matsuo, and Toshiaki Kondoo, 25 April 2024, The 5th Smart Laser Processing Conference (SLPC2024) (Yokohama, Japan), SLPC12-03.
Evolution of laser-induced periodic surface structures on thin transparent glass substrates observed by oil-immersion optical microscopy , Ryoji Kato and Shigeki Matsuo, 15 June 2023, 24th International Symposium on Laser Precision Microfabrication (LPM2023) (Hirosaki, Japan), R4-S24-4.
Pulse-resolved monitoring of formation process of LIPSS with laser-scanning strategy, Iida, K. and Matsuo, S. , 9 June 2022, 23rd International Symposium on Laser Precision Microfabrication (LPM2022) (Dresden, Germany / Online).
Oil-immersion microscopy observation of formation process of laser-induced periodic surface structures, Shigeki Matsuo and Yuta Yanagisawa, 26 April 2022 (video presentation with live Q&A), 16th International Conference on Laser Ablation (COLA 2021/2022) (Matsue, Japan / Online), Tu-O-73.
Fabrication of miniature internal threads in glass with reduced cracks by Laser processing in rhodamine aqueous solution , Takumi Seko and Shigeki Matsuo, 8-11 June 2021 (on-demand presentation), 22nd International Symposium on Laser Precision Microfabrication (LPM2021) (Hirosaki, Japan / Online).
Pulse-by-Pulse Optical Observation of Growth of Laser-Induced Periodic Surface Structure at Oblique Incidence, Kyosuke Shibata and Shigeki Matsuo, 24 June 2020, 21st International Symposium on Laser Precision Microfabrication (LPM2020), (Dresden, Germany / Online).
Pressure-dependent formation of laser-induced periodic surface structures on copper, Masato Kubo and Shigeki Matsuo, 22 May 2019, The 8th International Congress on Laser Advanced Materials Processing (LAMP2019), (Hiroshima, Japan), We2-L13.
Material processing using subnanosecond laser, Shigeki Matsuo, 14 March 2019, International Workshop on Integrated Nanooptics & Nanophotonics (Yokohama National University, Japan).
Laser-Induced Thermal and Mechanical Deformation of PDMS: a low Young's modulus material, Katsuyuki Hayashi and Shigeki Matsuo, 15 June 2018, 3rd workshop on Progress on Ultrafast Laser Modifications of Materials (PULMM) (Telluride, Colorado, USA).
Removal processing inside PDMS by short pulse laser, Katsuyuki Hayashi and Shigeki Matsuo, 6 June 2017, 18th International Symposium on Laser Precision Microfabrication (LPM2017) (Toyama, Japan), P-27.
Water-Assisted Laser Drilling for Miniature Internal Thread in Glass and Evaluation of its Strength, Reo Murakami, Hiroyuki Nakagawa, and Shigeki Matsuo, 6 June 2017, 18th International Symposium on Laser Precision Microfabrication (LPM2017) (Toyama, Japan), Tu2-O-4.
Intermittent release of stress can form periodic surface holes on glass: subsurface technique in femtosecond laser study, Shigeki Matsuo and Shuichi Hashimoto, 7 Nov. 2016, International Symposium on Optomechatronics Technology (ISOT2016), (Itabashi, Tokyo, Japan).
Bulk and surface processing of silicon by subnanosecond laser pulses, Shigeki Matsuo, 16 June 2016, 2nd workshop on Progress on Ultrafast Laser Modifications of Materials (PULMM) (Neuchâtel, Switzerland).
Sub-nanosecond laser induced periodic surface structures on pre-scratched silicon surface, Motoharu Hongo and Shigeki Matsuo, 24 May 2016, 17th International Symposium on Laser Precision Microfabrication (LPM2016) (Xi'an, China), P-9.
Fabrication of movable 3D microstructures in glass, Shigeki Matsuo, 29 Oct. 2014, 4th International Conference on Manipulation, Manu-facturing and Measurement on the Nanoscale (3M-nano2014) (Taipei, Taiwan), 12-5.
Spontaneous formation of periodically-modulated lines near the back surface of glass substrates: femtosecond laser processing with transverse-scanning, Shigeki Matsuo, Hiroki Yoshida, Shuichi Hashimoto, 19 June 2014, 15th International Symposium on Laser Precision Microfabrication (LPM2014) (Vilnius, Lithuania),Th3-O-16.