低溫真空探針平台 Lakeshore Cryogenic Probe Station
溫度範圍: 10 - 400 K
磁場範圍: ±2.5 Tesla (10 K); ±2 Tesla (10-400 K)
六探針
Temperature range: 10 - 400 K
Magnetic field range: ±2.5 Tesla (10 K); ±2 Tesla (10-400 K)
Six micro-manipulated probe arms
B1500A 半導體元件參數分析儀 Keysight Semiconductor Parameter Analyzer
Four high resolution SMUs, range up to ±100 V/0.1 A, measurement resolution 1 fA/0.5 μV
High power SMU, ±200 V/1 A, measurement resolution 10 fA/2 μV