Facilities

Sputtering System 1

Sputtering System 2

E-beam Evaporator

Glove Box

Fume Hood

Spin Coater

Mask Aligner (MIDAS)

Rapid Thermal Annealing (RTA, LAT)

O2 Plasma Treatment System

Clean System (TOGA)

Vacuum Probe Station (M6VC) with Laser System

Probe Station (MS TECH) with Laser System

Gas-controlled Probe Station with LED System (VPX-G400, WIT)

Laser Systems (260, 320, 450, 532, 650, 980 nm / CNI)

Semiconductor Parameter Analyzer (Keithley 4200A-SCS) with PMU

Oscilloscope 200MHZ 2GSa/s (SDOX1202A, KEYSIGHT)

Hall Effect Measurement System (HMS-3000, ECOPIA)

Alpha-Step IQ

UV-vis Spectrophotometer (UV-1800, SHIMADZU)