반도체 배기가스 처리(2007-)

같이 연구하는 기관들

• 삼성엔지니어링

• 명성EMI

• KC 코트렐

We are developing a maintenance free wet scrubber for acidic/basic exhaust gas from semiconductor plants using design of experiments, and computational fluid dynamics.

Related projects

• Development of maintenance free wet scrubber (2008-current), Samsung Engineering

• Reduction of white smoke during winter season (2014-current), Samsung Engineering

Related publications

1. Quantitative analysis of the impact of duct spray on scrubbing efficiency using experimental design (2019)

2. Enhancement of HF gas removal efficiency of a scrubber of a scrubber in semiconductor manufacturing process by using ANCOVA technique (2013)

3. Effects of the particle residence time and the spray droplet size on the particle removal efficiencies in a wet scrubber (2010)