ARPES
운동량 공간에서 전자 구조 측정
ARPES (R3000)
< 3meV at 2eV pass energy 20eV Kinetic energy
Energy Resolution is < 3mV
+/- 15 degree Transmission Mode Lens Acceptance
< 0.1 degree from 0.1 mm Spot Angular Resolution
Variable Temperature Operation
±10°, ±7,5°,±5°,±3° Angle modes
Kinetic energy range: 0.5 eV – 1500 eV
Bakeable to 150°C
LEED
표면 원자 배치 구조 분석
LEED
Understanding Structure of Singe Crystal Surface
Long-Range Order of Periodic Surface Structure
High Performance Optics
Light Shielded Miniature Electron Gun
50 or100 mm z-Retraction
Integral Multi-Segment Shutter
CVD
2차원 양자 물질 및 반도체 기판 합성
Standard CVD
Temperature Operation at R.T. - 1300°C
2D Materials Synthesis
Thermal CVD
Temperature Operation at R.T. - 1300°C
Two Furnaces System
2D Materials Synthesis
Cold-Wall CVD
Temperature Operation at R.T. - 1300°C
2D Materials Synthesis
High Vacuum System
Graphite Heating Zone
AFM
표면의 특징적인 형태 관찰
AFM
Nanoscale Topography Acquisition
Nanoscale Resolution
Dynamic Force Microscope
Surface Roughness Analysis
Height Line Profile
SEM
표면의 특징적인 형태 관찰
SEM
Nanoscale Resolution
3D Shape Surface Imaging
Raman Spectroscopy
화학 구조 결정과 화합물 식별
Raman spectroscopy
532nm Wavelength Light Source
Real-time Spectrum Acquisition
Single Spectrum Acquisition
Large Area Scan
Photolithography
나노 반도체 소자/ 에너지 소자 제작
Mask Aligner
200nm ~ 300nm Wavelength Light Source
Micro/Nanosize Patterning
Devices Fabrication
STM
실공간에서 전자 구조 측정
LT STM
Low Temperature Operation at T < 5 K
Lowest Thermal Drift & Highest Stablility
Variable Temperature Operation
Guided 3D Coarse Positioning
50 Hours LHe Hold Time & Fast Cool Down
Safe & Quick Sample / Tip Exchange
Optimal dI/dV Spectroscopy
XA VT STM
Temperature Operation at 50 K - 500 K
True pA STM and Spectroscopy
Guided 3D Coarse Positioning
Variable Temperature Operation
In - situ Evaporation capability
Optimal dI/dV Spectroscopy
Old VT STM
Temperature Operation at 120 K - 500 K
True pA STM and Spectroscopy
Guided 3D Coarse Positioning
Variable Temperature Operation
In - situ Evaporation capability
Optimal dI/dV Spectroscopy
E-beam beating for sample preparation