Laboratories & infrastructures
The cleanroom facilities
At the FBK-SD centre, state-of-the-art cleanrooms (CRD, CRM, CRP), ISO4-6, are available for microfabrication and packaging. The area of the cleanroom facilities is about 1500 m² and it is currently being expanded to about 2000 m². The cleanroom laboratories are equipped with advanced microfabrication system, such as:
Deposition: Magnetron sputtering, Evaporation, ALD, LPCSV, PECVS/ICP-PECVD, ...
Etching: dry etching, RIE/DRIE, wet etching, ...
Lithography: Direct laser writer, Projection lithography, Stepping lithography, Ion-beam/e-beam
Others: Diffusion, Oxidation, Ion implantation, Electroplating, 3D integration, ...
The material characterisation laboratories
The material characterisation laboratories are specialised in surface analytical techniques ranging from secondary ion mass spectrometry, x-ray photoelectron spectrometry, scanning probe microscopy, electron microscopy. Other more general purpose analytical techniques such as Raman and Photo Luminescence spectroscopies, X-ray diffraction and fluorescence are also available.
The cryogenic laboratory
Our cryogenic laboratory is fully dedicated to the characterisation of superconducting quantum devices at low temperature. The laboratory is currently equipped with two cryogenic systems:
Dry dilution refrigerator (Bluefors LD, T=10 mK)
Sumitomo cryocooler (T=2 K)
and advanced RF instrumentation for control and read-out of microwave circuits.
We are currently planning a further expansion of the cryogenic lab.
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