29/Mayo/2024

Hot source 1 Booster & Pulse valves performance test were realized.

Hot source valve cleaning.

https://www.fujikin.co.jp/support/pdf/700-05_high_tem_eng.pdf

https://www.fujikin.co.jp/en/product/series/list.php?category_id=31

High Temp paint for lower electrode mask

Bitacora de Depositos Beneq