奈米科學研究所由物理學系在民國97年8月成立，位於理學大樓，本所使用空間約1780坪。由於奈米科學是屬於整合性科學，學生來源除了物理系外，還包括化學系、材料科學系、光電工程系、電子工程系等理工相關系所，彙集了各種誇領域的學生，有利於拓展學生研究上的廣度，並激發各種想法。研究方向主要建立在物理原理上，研究微觀(奈米)尺度下之物理機制的新穎特性，並藉此應用於設計與製造各種奈米元件與各種檢測系統上。
研究方向著重於以下主題：奈米材料科學、原子層沉積製程、奈米材料製作、深次微米表面研究、原子力顯微術、表面原子結構分析、磊晶原子成長機制、半導體物理、奈米電子元件與應用、掃描探針技術、電性掃描探針顯微術、表面分析技術、奈米電漿子元件、奈米元件 、半導體感測器、生物磁場應用、超導電子元件物理與應用、磁性生醫檢測技術、生醫檢測設備開發、光學檢測技術等。
The Institute of Nanoscience was established by the Department of Physics in August 2008 and is located in the Science Building, with a total space of approximately 1,780 pings (about 5,880 square meters). Since nanoscience is an interdisciplinary field, students come not only from the Department of Physics but also from related departments such as Chemistry, Materials Science, Photonics, and Electrical Engineering. This diverse academic background fosters interdisciplinary collaboration, broadens research perspectives, and stimulates innovative ideas.
The institute's research is primarily based on physical principles, focusing on the novel properties of physical mechanisms at the microscopic (nanoscale) level. These principles are applied to the design and fabrication of various nanodevices and detection systems.
The main research areas include:
Nanomaterials science
Atomic layer deposition processes
Nanomaterials fabrication
Deep submicron surface studies
Atomic force microscopy
Surface atomic structure analysis
Epitaxial atomic growth mechanisms
Semiconductor physics
Nanoelectronic devices and applications
Scanning probe technology
Electrical scanning probe microscopy
Surface analysis techniques
Nanoplasmonic devices
Nanodevices
Semiconductor sensors
Biomedical magnetic field applications
Superconducting electronic device physics and applications
Magnetic biomedical detection technology
Development of biomedical detection equipment
Optical detection technology