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Physical Vapor Deposition (PVD) Systems:
Physical Vapor Deposition (PVD) Systems:
We specialize in custom design UHV sputtering and PECVD system for R&D and low volume production with the reliability of high throughput production system. Each processing module could be configured as a stand alone system or a cluster configuration with other process modules and integrated wafer handling platform. Please contact us with your specifications.
We specialize in custom design UHV sputtering and PECVD system for R&D and low volume production with the reliability of high throughput production system. Each processing module could be configured as a stand alone system or a cluster configuration with other process modules and integrated wafer handling platform. Please contact us with your specifications.
Chemical Vapor Deposition (CVD) Furnace:
Chemical Vapor Deposition (CVD) Furnace:
As part of our expanding product line, we are offering a new line of CVD tube furnaces with integrated gas and liquid control system. Our modular design furnace could be quickly customized to your specific needs. Please contact us for more information.
As part of our expanding product line, we are offering a new line of CVD tube furnaces with integrated gas and liquid control system. Our modular design furnace could be quickly customized to your specific needs. Please contact us for more information.
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