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Deep Learning-Based Domain Adaptation Method for Fault Diagnosis in Semiconductor Manufacturing
Deep Learning-Based Domain Adaptation Method for Fault Diagnosis in Semiconductor Manufacturing
Moslem Azamfar, Xiang Li*, Jay Lee
IEEE Transactions on Semiconductor Manufacturing, 2020.
[ Paper | Project Page ]
Adaptive Virtual Metrology Method Based on Just-in-time Reference and Particle Filter for Semiconductor Manufacturing
Adaptive Virtual Metrology Method Based on Just-in-time Reference and Particle Filter for Semiconductor Manufacturing
Haoshu Cai, Jianshe Feng*, Feng Zhu, Qibo Yang, Xiang Li, Jay Lee
Measurement, 2021, 168: 108338.
[ Paper | Project Page ]
A virtual metrology method with prediction uncertainty based on Gaussian process for chemical mechanical planarization
A virtual metrology method with prediction uncertainty based on Gaussian process for chemical mechanical planarization
Haoshu Cai, Jianshe Feng*, Qibo Yang, Wenzhe Li, Xiang Li, Jay Lee
Computers in Industry, 2020, 119, 103228.
[ Paper | Project Page ]
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