Research Area

Process Engineering for Semiconductor Device Microfabrication

Design, fabrication, and testing of advanced microelectronics, sensors, magnetic MEMS actuators, microfluidic lab-on-a-CMOS devices, powder MEMS micromagnets, optoelectronics, photodiodes, and CMOS memory devices. Key microfabrication techniques involve dry (RIE) and wet etching for precise material grooving, photolithography, and UV laser writing for intricate substrate patterning, and deposition processes such as sputtering, ALD, CVD, and e-beam evaporation systems and electroplating to create functional device layers. Microfabrication work is conducted in 100/1000 cleanroom environments, maintaining stringent standards of precision and cleanliness to ensure optimal device performance. 

Integration, Bonding, and Packaging

Development, bonding, and packaging of Lab-on-CMOS devices, integrating both microfluidic functionalities and advanced electronic components on a unified platform. Parylene coating is utilized for biocompatible and protective encapsulation, while thermocompression bonding ensures secure bonding with PMMA-PMMA substrates. Si-PMMA bonding is facilitated using thermoplastic elastomer (TPE) as an intermediary layer, and PDMS-glass bonding is achieved via oxygen plasma treatment, ensuring robust adhesion and chemical stability. An integration of interdigitated electrodes enhances precise electrical control and readout capabilities within the system. Additionally, efforts are directed towards incorporating optoelectronics and MOS-based memory devices directly on-chip, enabling multifunctional platforms for both sensing and data storage. These integrations pave the way for lab-on-CMOS devices with embedded optical and electronic systems, providing real-time data acquisition, processing, and storage for biomedical applications. 

Microfabrication for Biomedical Device Development (MedTech) 

Fabrication of integrated MEMS microfluidic Lab-on-chip systems to achieve precise particle/drug manipulation and in vitro drug testing, with a focus on drug compartmentalization in fewer chambers to provide a quick efficacy response. Capillary-driven microfluidics for separation and isolation of cells/particles. Patterned micromagnets within the channels allow for controlled movement of magnetic beads, enhancing bioassays. The system supports rapid dosing and combinational testing of multiple drugs on a single chip, enabling real-time analysis of cellular responses to varying concentrations. This approach streamlines screening processes and advances personalized medicine and combinational therapies.

Beyond CMOS devices 

Assembly of magnetoelectric (ME)/piezoelectric with lab-on-chip and microfluidic systems for advanced applications like anticancer drug/magnetic nanoparticle quantification and single-particle/cell manipulation. A novel magnetoelectric material is integrated with the Lab-on-chip (LoC), which requires zero power during operation. This device is driven by IR light or a heat-mediated sensor, including the pyroelectric effect. It can push the boundaries of traditional CMOS, creating scalable, multifunctional platforms for next-generation biomedical and sensing technologies, including targeted drug delivery, diagnostics, and single-cell analysis. Voltage-controlled strain-mediated manipulation system in ME-LoC.

Design of Experiment (DOE) and Optimization

Optimizing device designs to achieve high performance using advanced simulation tools, including MATLAB, COMSOL, and Clewin. MATLAB, Machine learning algorithms, Excel, and ORIGIN are employed for and data analysis and image processing, while COMSOL enables multiphysics simulations design optimization, providing detailed modeling of thermal, mechanical, and fluidic behaviors. Clewin is utilized for layout design and verification, ensuring precise patterning and adherence to fabrication standards. Data analysis and image processing using machine learning algorithms, Excel, and ORIGIN.