RESEARCH AREA
RESEARCH AREA
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Advanced Nano-Scale Fabrication/Engineering for Emerging Electronic Devices
My research vision focuses on developing emerging electronic devices by creating novel functionalities in materials/structures through advanced nano-scale fabrication techniques.
TECHNOLOGIES
TECHNOLOGIES
CMOS Process
CMOS Process
Deposition: Atomic Layer Deposition (ALD), (Co-/Reactive-)Sputtering, (Thermal/E-beam) Evaporation
Etching: RIE, DRIE
Lithography: (Photo-/E-beam) lithography
Plasma-Enhanced Atomic Layer Process
Plasma-Enhanced Atomic Layer Process
PEALD Engineering for Functional Metal-Oxide Thin Films
Low-temperature PEALD for Flexible Electronics
Atomic Layer Etching of 2D Materials and Dielectric Film
Remote Epitaxy (NEW)
Graphene Buffer Layer (GBL) Growth
Atomic Layer Lift-Off (ALLO)
MOCVD III-N Remote Epitaxy
CURRENT APPLICATIONS
CURRENT APPLICATIONS
Synaptic DevicesÂ
Synaptic DevicesÂ
for Neuromorphic ComputingÂ
for Neuromorphic ComputingÂ
Metal-Oxied Electrochemical RAM (ECRAM)
Monolithic 3D integration (NEW)
Monolithic 3D integration (NEW)
Wafer-scale Remote epitaxy
2D Material-based Layer Transfer (2DLT) for High PPI micro-LED
PREVIOUS APPLICATIONS
PREVIOUS APPLICATIONS
Unconventional Electronic Devices
Unconventional Electronic Devices
High-Performance Flexible Electronics
High-Performance Flexible Electronics
Electrochemical Devices
Electrochemical Devices
Low-Temperature Solid Oxide Fuel Cell
Low-Temperature Solid Oxide Fuel Cell
/ Gas Sensor
/ Gas Sensor
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