Best SECS/GEM software solutions for equipment manufacturers (OEMs)

eInnoSys offers SECS/GEM software solutions for equipment manufacturers (OEMs) as well as factories (FABs or ATMs). By integrating eInnoSys’ EIGEMEquipment plug-n-play software with equipment controller software of an equipment, OEMs can significantly reduce the cost and time it takes to make their equipment SECS/GEM capable. Likewise, EIGEMHost is a SECS/GEM software for FABs and ATMs (Assembly and Test Manufacturing) to communicate with various equipment in the factory. EIGEMSim is a simulator software for SECS/GEM testing. It is a software that can be configured as host or equipment to test SECS/GEM communication of the other.

SECS describe the communication between a host computer and the equipment using a single connection. In the original concept and even today in the most common scenario, the equipment provides a single SECS interface for exclusive use by a single host. The message types defined by SECS are partially asymmetric – some message types are defined only for host use, others are defined only for equipment, but also many of them are defined for the same use by either side.

However, there is provision in the SECS standards for sharing a connection by specifying the device identification value in each message. The practice of connection sharing is not recommended for new deployments. It is a common practice that a connection is maintained for long periods of time and only interrupted if the equipment or host is rebooted. SECS connections are light weight and don’t use much network bandwidth. It is possible to run several SECS connections on a typical desktop computer.

Among the capabilities offered by the SECS/GEM standard is –

• For fab host to start and stop processing

• For fab host to select, download and upload recipes from/to the equipment

• For fab host to query the equipment for values of various process parameters and equipment configuration

• For fab host to set equipment configuration parameter values

• For equipment to send alarms to the fab host

• For fab host to define reports of various variables and associate them with events such as lot start or wafer complete

• For equipment to send various events and associated reports to the fab host
  
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