Microelectromechanical Systems Laboratory

at Suranaree University of Technology  (SUT MEMS)


 Research activities

  Design and fabrication of:
  • Microelectromechanical systems (MEMS)
  • Micro devices based on synchrotron x-ray lithography
  • Micro sensors, micro actuators
  • Micro parts, micro machines
  • Microfluidic devices
  • Embedded systems

 Research grants awarded

  • "Development of CE microfluidic chips micromachining technique by powder blasting through LIGA hard masks",
    funded by the Synchrotron Light Research Institute, October 1, 2008 - September 30, 2009,
    400,000 THB

  • "Development of high precision plastic injection molds using LIGA-EDM technique",
    funded by the Synchrotron Light Research Institute, October 1, 2008 - September 30, 2009,
    400,000 THB

  • "Development of capacitive pressure sensor using microelectromechanical systems technology",
    funded by the Commission on Higher Education and Thailand Research Fund, December 1, 2006 - November 30, 2008,
    360,000 THB

  • "Process developments for high-aspect-ratio microelectromechanical systems (HARMS) using x-ray lithography at the siam photon laboratory",
    funded by the Synchrotron Light Research Institute, December 1, 2005 - November 30, 2007,
    2,021,250 THB (SUT overhead 63,750 THB)

  • "Design and fabrication of capacitive humidity sensors using micro-electro-mechanical systems (MEMS) technology",
    funded by the National Electronics and Computer Technology Center, February 23, 2004 - February 22, 2007,
    1,320,000 THB (SUT overhead 105,454 THB)

  • "Study of thai bank note identification methods: Implementation guideline of bank note identifier for the blind and visually impaired persons",
    funded by the Suranaree University of Technology, Jan 23, 2003 - Jan 23, 2004,
    50,000 THB

     Research highlights

     Contact

    • Nimit Chomnawang, Ph.D.
      School of Electrical Engineering
      Institute of Engineering
      Suranaree University of Technology
      Nakhon Ratchasima, Thailand 30000
    • E-mail: sut.mems@gmail.com
    • Phone: +66 81-877-9601
    • Fax: +66 4422-4601