JT-STM
- SPECS, JT-STM model.
- Joule-Thomson stage
- Low temperature mode: 1.2 K
- Base pressure < 1.0x10-10 Torr
VT-STM
- RHK, UHV 700 model
- Variable temperature: 25 ~ 1000K
- Base pressure < 1.0x10-10 Torr
Kelvin Probe Force Microscope
- PSIA, XE-70 model
- AFM, EFM, MFM, LFM, C-AFM modes are available.
Thermal CVD
- Graphene Synthesis
- Max. Temp : 1000 oC
- Base pressure : 1.0 mTorr
Ultra High Vacuum System
A homebuilt UHV chamber
- Base pressure : 1.0x10-10 Torr
- Ion pump, turbo pump and TSP are installed
- E-beam evaporator and Thermal evaporator
- E-beam sample heating