My projects

Academic  Research

Doctor of Philosophy (Optical MEMS, Sept 2007 - 2011 )

School: University of Twente, MESA+ Institute for Nanotechnology, Integrated Optical Micro Systems Group (IOMS), the Netherlands.

Project: An integrated optics sensor based on interferometry, for accurate detection of MEMS displacements.

Skills: Theoretical background in (integrated) optics, experience in technology, general clean-room work, lithography and patterning techniques, characterization techniques of materials properties, or integrated optics.


The MEMSLand project, in which the PhD student will be active, is one within the Point One program, funded by Economic Affairs. The official period for the project is 2006-2009. Some 30 NL industrial and university groups are involved, focusing on MEMS related topics.

Accurate measurements of small displacements are relevant for all kind of applications, like gyroscopes, accelerometers, nano-scale fabrication and, since recently, also sensing of molecules, via concentration dependent stress-induced displacements of cantilevers. The read-out of such small displacements is often done via optical interference, optical beam deflection or capacity changes. Herewith a typical resolution of 0.1-1pm can be achieved, assuming an integration time of ~1s. On the basis of present and past research it is anticipated that integrated optics (IO) devices can outperform the former ones by at least one order of magnitude.

IO displacement sensors can be based on classical principles like the Mach-Zehnder interferometer, utilizing diffractionless propagation of light over lengths up to tens of cm’s. The planned research will focus on ultra-sensitive read out of small cantilever displacements, with compact photonic crystal devices, utilizing the potentially high sensitivity related to slow light propagation.

Master of Science-MSc. (Advanced Materials Science and Engineering : March 2005-June 2007)

School: SungKyunKwan University (SKKU), Dept. of Matericals Science and Engineering, Semiconductor and thin film devices Lab (STD), Suwon, South of KOREA.

Project: Simulation and Fabrication of Piezoelectric MEMS Inkjett Print Heads.

Skills : CFD-ACE+ V2004, FEMLAB 3.1, Intellisuite 8.1, MEMS techniques: PZT synthesis by sol-gel method, Photolithography (double), Wet etching, RIE, DRIE, LPCVD, PECVD, Sputtering, E-beam evaporation.

Abstract: in English


Bachelor of Engineering-BEng. (Mechanical Engineering : Sept 1999-June 2004)

School : Polytechnics of Hochiminh City (Hochiminh City University of Technology) and Polytechnics of Hanoi (Hanoi University of Technology), VIETNAM

Project: Design and Fabrication of Piezoresistive Pressure Sensors using MEMS technology.

Skills : ANSYS 7.0, MABLE 6.0, MEMS techniques: photolithography (single), wet etching (KOH), thermal oxidation (SiO2), Metalliztion (electrode Al), Spin on glass (SOG).

Abstract:  in English and French