Research
 Group Members
 Publications
 Outreach
 Group Meetings
 Lab Resources
 Contacts

  2015

S. Chen, L. E. Luna, Z. You, C. Carraro, R. Maboudian, "Ni-induced graphitization for enhanced long-term stability of ohmic contact to polycrystalline 3C-SiC", Journal of Vacuum Science & Technology A 33, 031507 (2015).

C. R. Serrao, A. M. Diamond, S.-L. Hsu, L. You, S. Gadgil, J. Clarkson, C. Carraro, R. Maboudian, C. Hu, S. Salahuddin, “Highly crystalline MoS2 thin films grown by pulsed laser deposition”, Applied Physics Letters 106, 052101 (2015). 

J. B. In, B. Hsia, J.-H. Yoo, C. Carraro, R. Maboudian, C. P. Grigoropoulos, "Facile fabrication of flexible all solid-state micro-supercapacitor by direct laser writing of porous carbon in polyimide", Carbon 83, 114-151 (2015).

A. Harley-Trochimczyk, J. Chang, Q. Zhou, J. Dong, T. Pham, M. Worsley, R. Maboudian, A. Zettl, W. Mickelson,  "Catalytic hydrogen sensing using microheated platinum nanoparticle-loaded graphene aerogel", Sensors and Actuators B: Chemical 206, 399-406 (2015).

  2014

P. Lobaccaro, A. Raygani, A. Oriani, N. Miani, A. Piotto, R. Kapadia, M. Zheng, Z. Yu, L. Magagnin, D. C. Chrzan, R. Maboudian, A. Javey, "Electrodeposition of High-Purity Indium Thin Films and its Application to Indium Phosphide Solar Cells", Journal of Electrochemical Society 161, D794-D800 (2014).

B. Hsia, M. S. Kim, L. E. Luna, N. R. Mair, Y. Kim, C. Carraro, R. Maboudian, "Templated 3D Ultrathin CVD Graphite Networks with Controllable Geometry: Synthesis and Application As Supercapacitor Electrodes", ACS Applied Materials and Interfaces 6, 18413-18417 (2014).

Y. Kim, Y. Chung, Y. Tian, C. Carraro, R. Maboudian, "Two-Fluid Wetting Behavior of Hydrophobic Silicon Nanowire Array", Langmuir 30, 13330-13337 (2014).

J.-H. Lee, I. Bargatin, B. K. Vancil, T. O. Gwinn, R. Maboudian, N. A. Melosh, R. T. Howe, "Microfabricated Thermally Isolated Low Work-Function Emitter", Journal of Microelectro-mechanical Systems 23 (5), 1182-1187 (2014).

Y. Kim, Y. Chung, A. Tsao, R. Maboudian, "Tuning Micropillar Tapering for Optimal Friction Performance of Thermoplastic Gecko-Inspired Adhesive", ACS Applied Materials and Interfaces 6, 6936-6943 (2014).

H. Fang, C. Battaglia, C. Carraro, S. Nemsak, B. Ozdol, J.S. Kang, G. Conti, A. Minor, C. S. Fadley, E. Yablonovitch, R. Maboudian, A. Javey, "Strong interlayer coupling in van der Waals heterostructures built from single-layer chalcogenides", Proceedings of the National Academy of Science 111, 6198-6202 (2014).

J. P. Alper, S. Wang, F. Rossi, G. Salviati, N. Yiu, C. Carraro, R. Maboudian, "Selective Ultrathin Carbon Sheath on Porous Silicon Nanowires: Materials for Extremely High Energy Density Planar Micro-Supercapacitors", Nano Letters 14, 1843-1847, (2014).

S. Wang, B. Hsia, C. Carraro, R. Maboudian,"High-performance all solid-state micro-supercapacitor based on patterned photoresist-derived porous carbon electrode and ionogel electrolyte", Journal of Materials Chemistry A 2, 7997-8002, (2014).

M. S. Kim, B. Hsia, C. Carraro, R. Maboudian, "Flexible micro-supercapacitors from photoresist-derived carbon electrodes on flexible substrates", Proceedings of IEEE MEMS Conference, San Francisco CA, January 2014, pp. 389-392.

N. Ballarin, C. Carraro, R. Maboudian, L. Magagnin, "Electropolishing of n-type 3C-polycrystalline silicon carbide", Electrochemistry Communications 40, 17-19 (2014).

B. Hsia, J. Marschewski, S. Wang, J. B. In, C. Carraro, D. Poulikakos, C. P. Grigoropoulos, R. Maboudian, "Highly flexible all solid-state micro-supercapacitors from vertically aligned carbon nanotubes", Nanotechnology 25, 55401-55403, (2014).

C. Battaglia, X. Yin, M. Zheng, I. Sharp, T. Chen, A. Azcatl, S. McDonell, C. Carraro, R. Maboudian, R. Wallace, A. Javey, "Hole selective MoOx contact for hybrid silicon solar cells", Nano Letters 14, 967-971, (2014).

  2013

R. Kapadia, Z. Yu, H.-H. H. Wang, M. Zheng, C. Battaglia, M. Hettick, D. Kiriya, K. Takei, P. Lobaccaro, J. W. Beeman, J. W. Ager, R. Maboudian, D. C. Chrzan, A. Javey, "A direct thin-film path towards low-cost large-area III-V photovoltaics", Scientific Reports 3, 2275-2279 (2013).

A.
Gutés, B.-Y. Lee, C. Carraro, W. Mickelson, S.-W. Lee, R. Maboudian, "Impedimetric graphene-based aptasensor for the detection of polybrominated diphenyl ether", RSC Nanoscale 5, 6048-6052 (2013).

R. Parsa, W.S. Lee, M. Shavezipur, J. Provine, R. Maboudian, S. Mitra, H.-S. P. Wong, R.T. Hower, "Laterally Actuated Platinum-Coated Polysilicon NEM Relay", Journal of Microelectrochemical Systems 22, 768-778 (2013).

Y. Kim, R. Claus, F. Limanto, R.S. Fearing, R. Maboudian, "Friction Characteristics of Polymeric Nanofiber Arrays against Substrates with Tailored Geometry", Langmuir 29, 8395-8401 (2013).

B. Hsia, S. Wang, M.-S. Kim, C. Carraro, R. Maboudian, "All Solid-State Micro-Supercapacitors using Ionogel Electrolyte", Proceedings of the 16th International Conference on Solid-State Sensors and Actuators, Transducers '13, pp. 1328-1331 (2013).

B. Hsia, M.-S. Kim, C. Carraro, R. Maboudian, "Cycling characteristics of high energy density, electrochemically activated porous-carbon supercapacitor electrodes in aqueous electrolytes", Journal of Materials Chemistry A, DOI:10.1039/C3TA11670K (2013).

M. Shavezipur, C. Carraro, R. Maboudian, "Effects of actuation methods and temperature on adhesion force between polycrystalline silicon surfaces in MEMS", SPIE Proceeding, 8614, 861402-17 (2013).

R. Maboudian, C. Carraro, D. G. Senesky, C.S. Roper, "Advances in Silicon Carbide Science & Technology at the Micro and Nano Scales", (invited) Journal of Vacuum Science and Technology A, 31, 050805-1 (2013).

A. Gut
és, C. Carraro, R. Maboudian, "Nitrate amperometric sensor in neutral pH based on Pd nanoparticles on epoxy-copper electrodes", Electrochimica Acta, Accepted Manuscript, (2013).

M. Shavezipur, W. Gou, C. Carraro, Y. Tian, R. Maboudian, I. Gelmi, R. Campedelli, M. Azpeitia, "In-line Adhesion Monitoring and the Effects of Process Variations on Adhesion", The 17th International Conference on Solid-State Sensors, Actuators, and Microsystems, Barcelona, Spain. June 16-20, 2013. pp. 4.

B. Hsia, M.-S. Kim, M. Vincent, C. Carraro, R. Maboudian, "Photoresist-derived porous carbon for on-chip supercapacitors", Carbon, 57, 395-400 (2013).

J. P. Alper, A. Gut
és, C. Carraro, R. Maboudian, "Semiconductor Nanowires Directly Grown on Graphene – Towards Wafer Scale Transferable Nanowire Arrays with Improved Electrical Contact", Nanoscale, DOI:10.1039/C3NR00367A

J. P. Alper, M. S. Kim, M. Vincent, B. Hsia, V. Radmilovic, C. Carraro, R. Maboudian, “Silicon Carbide Nanowires as Highly Robust Electrodes for Microsupercapacitor Applications”, Journal of Power Sources, 230, 298–302 (2013).

I. Laboriante, A. Suwandi, C. Carraro, R. Maboudian, “Lubrication of polycrystalline silicon MEMS via a thin silicon carbide coating”, Sensors and Actuators A: Physical, 193, 238-245 (2013).

Y. Kim, A. Tsao, D. H. Lee, R. 
Maboudian, “Solvent-induced Formation of Unidirectionallly Curved and Tilted Si Nanowires during Metal-assisted Chemical Etching”, Journal of Materials Chemistry, 1, 220-224 (2013).

  2012

A.A. Torkelson, A.K. da Silva, D.C. Love, J.Y. Kim, J.P. Alper, B. Coox, J. Dahm, P. Kozodoy, R. Maboudian, K.L. Nelson, “Investigation of quaternary ammonium silane-coated sand filter for the removal of bacteria and viruses from drinking water”, Journal of Applied Microbiology, 113, 1196–1207 (2012).

M. Shavezipur, W. Gou, M. Fisch, C. Carraro and R. Maboudian. “In-Line Measurement of Adhesion Force using Electrostatic Actuation and Capacitive Readout”, Journal of Microelectromechanical Systems, 21, 768-770 (2012).

M. Shavezipur, W. Gou, C. Carraro and R. Maboudian, Characterization of Adhesion Forces in MEMS at High Temperature using Thermally Actuated Microstructures, Journal of Microelectromechanical Systems21, 541-548 (2012).

A. Gutés, R. Maboudian and C. Carraro, "
Gold-Coated Silver Dendrites as SERS Substrates with Improved Lifetime", Langmuir, 28 (51), 17846-17850 (2012).

J. P. Alper, M. Vincent, C. Carraro, and R. Maboudian, “
Silicon Carbide Coated Silicon Nanowires as Robust Electrode Material for Aqueous Supercapacitor”, Applied Physics Letters, 100, 163901 (2012).

B.I. Hsia, M. Vincent, M.S. Kim, C. Carraro, and R. Maboudian, “Photoresist-Derived Porous Carbn For Integrated On-Chip Energy Storage”, Proceedings of the 2012 Solid-State Sensor and Actuator Workshop, Hilton Head '12, pp. 254-255 (2012).

J. H. Lee, I. Bargatin, K. Iwami, K. A. Littau, M. Vincent, R. Maboudian, Z.-X. Shen, N. A. Melosh, and R.T. Howe, “Encapsulated Thermionic Energy Converter with Stiffened Suspension”, Proceedings of the 2012 Solid-State Sensor And Actuator Workshop, Hilton Head ‘12, pp. 493-496 (2012).

J.P. Snapp, J.-H. Lee, J Provine, I. Bargatin, R. Maboudian, T.H. Lee, and R.T. Howe, “Sidewall Silicon Carbide Emitters for Terahertz Vacuum Electronics”, Proceedings of the 2012 Solid-State Sensor And Actuator Workshop, Hilton Head ‘12, pp. 336-338 (2012).

S. R. Broderick, C. Suh, J. Provine, C. S. Roper, R. Maboudian, R.T. Howe, and K. Rajan, “Informatics-Guided Analysis of Multidimensional Processing Parameters on the Infrared Spectral Response of SiC Films”, Surface and Interface Analysis 44, 365-371 (2012).

I. Laboriante, N. Farrokhzad, M. Fisch, M. Shavezipur, C. Carraro, R. Maboudian, Q. Bai, M. Liu, S. Hoen, "Charging and discharging behavior in dielectric-coated MEMS electrodes probed by Kelvin probe force microscopy", J. Micromech. Microeng. 22, 065031 (2012).

C.S. Roper, A. Gutés, C. Carraro, R.T. Howe, R. Maboudian "Single crystal silicon nanopillars, nanoneedles, and nanoblades with precise positioning for massively parallel nanoscale device integration", Nanotechnology, 23, 225303 (2012). Featured on Journal Cover.

M. Vincent, M. Kim, Carlo Carraro, R. Maboudian, “Silicon Carbide Nanowires as Electrode Material for High-temperature Supercapacitor”, Proceedings of IEEE MEMS Conference, 39-42 (2012).

M. Vincent, J. Zhang, Carlo Carraro, R. Maboudian, “A SiC Metallization Scheme using an ALD Protective Layer for Harsh Environment Devices”, Proceedings of IEEE MEMS Conference, 385-388 (2012).

A. Gutés, C. Carraro, R. Maboudian, "Single-layer CVD grown graphene decorated with metal nanoparticles as promising biosensing platform", Biosensors & Bioelectronics, 33, 56-59 (2012).

Y. Kim, F. Limanto, D.H. Lee, R.S. Fearing, R. Maboudian, "Role of Counter-substrate Surface Energy in Macroscale Friction of Nanofiber Arrays", Langmuir, 2922-2927 (2012).

A. Gutés, B. Hsia, A. Sussman, W. Mickelson, A. Zettl, C. Carraro, R. Maboudian, "Graphene decoration with metal nanoparticles: Towards easy integration for sensing applications", Nanoscale, 4, 438-440 (2012).


  2011

M. Shavezipur, Y. Kim, C. Carraro, and R. Maboudian, "Silicon-based Gecko-inspired Adhesive Structures with Active and Passive Adhesion Control", Technical Digest of Workshop on Technologies for Future Micro-Nano Manufacturing (MFG 2011), Napa, California. August 8-10, 2011. pp. 2778-2781.

W.-C. Lien, D.-S. Tsai, S.-H. Chiu, D. G. Senesky, R. Maboudian, A. P. Pisano, and J.-H. He, “Low-Temperature, Ion Beam Assisted SiC Thin Films with Anti-reflective ZnO Nanorod Arrays for High-Temperature Photodetection”, IEEE Electron Device Letters, 32, 1564-1566 (2011)
.

M. Shavezipur, G.H. Li,  I. Laboriante, W.J. Gou, C. Carraro, and R. Maboudian, "A finite element technique for accurate determination of interfacial adhesion force in MEMS using electrostatic actuation", J. Micromech. Microeng. 21, 115025 (2011).

F. Liu, A. Gutés,  I. Laboriante, C. Carraro, and R. Maboudian, "Graphitization of n-type polycrystalline silicon carbide for on-chip supercapacitor application", Appl. Phys. Lett. 99, 112104 (2011); also featured in the Virtual Journal of Nanoscale Science and Technology, Vol. 24 (13), September 26, 2011.

I. Laboriante, M. Fisch, A. Payamipour, F. Liu, C. Carraro, R. Maboudian, "Morphological, Electrical, and Chemical Changes in Cyclically Contacting Polycrystalline Silicon Surfaces Coated with Perfluoroalkylsilane Self-Assembled Monolayer", Tribology Letters 44, 13-17 (2011).
 
D.H. Lee, Y. Kim, R.S. Fearing, R. Maboudian, "Effect of Fiber Geometry on Macroscale Friction of Ordered Low-Density Polyethylene Nanofiber Arrays", Langmuir, 27, 11008-11016 (2011).

D.H. Lee, Y. Kim, G.S. Doerk, I. Laboriante, R. Maboudian, "Strategies for controlling Si nanowire formation during Au-assisted electroless etching", Journal of Materials Chemistry, 21, 10359-10363 (2011); also featured in the Virtual Journal of Nanoscale Science and Technology, Vol. 24 (4), July 25, 2011.

A. Gutés, C. Carraro, R. Maboudian, "Nonenzymatic Glucose Sensing Based on Deposited Palladium Nanoparticles on Epoxy-Silver Electrodes", Electrochimica Acta, 56, 5855-5859 (2011).

F. Liu, A. Gutés,  C. Carraro, R. Maboudian, “Graphitization of n-Type Polycrystalline Silicon Carbide and Its Application for Micro-Supercapacitors”, Technical Digest, Proceedings of 16th International Conference on Solid State Sensors and Actuators (Transducers’11), Beijing, China, June 5-9, 2011, pp. 1879-1882.

I. Laboriante, N. Klejwa, A. Suwandi, C. Carraro, R.T. Howe, R. Maboudian, “Suppression of Wear in Cyclically Loaded Polycrystalline Silicon MEMS via a Thin Silicon Carbide Coating,” Technical Digest, Proceedings of 16th International Conference on Solid State Sensors and Actuators (Transducers’11), Beijing, China, June 5-9, 2011, pp. 2319-2322.

M. Shavezipur, G.H. Li, W. Gou, C. Carraro, R. Maboudian, “Measurement Of Adhesion Force at Elevated Temperatures in MEMS using Thermal-Structural Actuation”, Technical Digest, Proceedings of 16th International Conference on Solid State Sensors and Actuators (Transducers’11), Beijing, China, June 5-9, 2011, pp. 2414-2417.

J.-H. Lee, I. Bargatin, J. Provine, F. Liu, M.-K. Seo, R. Maboudian, M.L. Brongersma, N. A. Melosh, Z.X. Shen, R. T. Howe, “Effect of illumination on thermionic emission from microfabricated silicon carbide structures”, Technical Digest, Proceedings of 16th International Conference on Solid State Sensors and Actuators, Transducers’11, Beijing, China, June 5-9, 2011, pp. 2658-2661.

G. Doerk, C. Dhong, C. Politi, I. Laboriante, C. Carraro, R. Maboudian, “Micellar block copolymer templated galvanic displacement for epitaxial nanowire device integration”, Journal of Materials Chemistry, 21, 8807-8815 (2011).

A. Gutés, C. Carraro, R. Maboudian, "Ultrasmooth Gold Thin Film by Self-Limiting Galvanic Displacement on Silicon", ACS. App. Mater. Interf., 3, 1581-1584 (2011).

R. Parsa, M. Shavezipur, W.S. Lee, S. Chong, P. H-S, R. Maboudian, and R. Howe, "Nanoelectromechanical Relays with Decoupled Electrode and Suspension", The 24th International Conference on Micro Electro Mechanical Systems (MEMS 2011), Cancun, Mexico, January 23-27, 2011, pp. 1361-1364.

N. Ferralis, R. Maboudian, C. Carraro, "Determination of substrate pinning in epitaxial and supported graphene layers via Raman spectroscopy", Phys. Rev. B, 83, 081410 (2011). 

B. Hsia, N. Ferralis, D. Senesky, A. P. Pisano, C. Carraro, and R. Maboudian, "Epitaxial Graphene Growth on 3C–SiC(111)/AlN(0001)/Si(100)", Electrochem. Solid-State Lett., 14, K13-K15 (2011).


  2010

F. Liu, B. Hsia, C. Carraro, A.P. Pisano, and R. Maboudian, "Enhanced Ohmic contact via graphitization of polycrystalline silicon carbide", Appl. Phys. Lett., 97, 262107 (2010).

I. Laboriante, B. Bush, D. Lee, F. Liu, T.-J. King-Liu, C. Carraro, R. Maboudian, "Interfacial Adhesion between Rough Surfaces of Polycrystalline Silicon and Its Implications for M/NEMS Technology", J. Adhes. Sci. Technol., 24, 2545-2556 (2010). Invited paper.

F. Liu, C. H. Li, C. Carraro, A. P. Pisano, and R. Maboudian,"Low-energy Ion Bombardment to Tailor the Interfacial and Mechanical Properties of Polycrystalline 3C-silicon Carbide, J. of Vac. & Tech. A, 28, 1259 (2010).

F. Liu, B. Hsia, D. G. Senesky, C. Carraro, A. P. Pisano, and R. Maboudian, “Ohmic Contact with Enhanced Stability to Polycrystalline Silicon Carbide via Carbon Interfacial Layer”, Proc. of Solid-State Sensors, Actuators, and Microsystems Workshop Hilton Head Island, South Carolina, June 6-10, 2010, pp. 214-217.

G.H. Li, I. Laboriante, F. Liu, M. Shavezipur, C. Carraro, R. Maboudian, "Measurement of adhesion forces between polycrystalline silicon surfaces via a MEMS double-clamped beam test structure", J. Micromech. Microeng., 20, 095015 (2010).

G. Doerk, C. Carraro, R. Maboudian, "Single Nanowire Thermal Conductivity Measurements by Raman Thermography" ACS Nano, 4, 4908-4914 (2010).


G. Doerk, G. Lestari, F. Liu, C. Carraro, R. Maboudian, "Ex situ vapor phase doping of silicon nanowires using BBr3", Nanoscale, 2, 1165-1170 (2010).


N. Ferralis, "Probing Mechanical Properties of Graphene With Raman Spectroscopy", Journal of Materials Science, 45, 5135 (2010);


W.-C. Lien, K.B. Cheng, D.G. Senesky, C. Carraro, A.P. Pisano, R. Maboudian, "Growth of 3C-SiC thin film on AlN/Si(100) with Atomically Abrupt Interface Via Tailored Feeding Procedure" Electrochemical and Solid State Letters, 13, D53 (2010).


A. Gutés, I. Laboriante, C. Carraro, R. Maboudian, "Palladium Nanostructures from Galvanic Displacement as Hydrogen Peroxide Sensor", Sens. Actuator-B, 147, 681-686 (2010).


G. Doerk, V. Radmilovic and R. Maboudian, "Branching induced faceting of Si nanotrees", Appl. Phys. Lett., 96, 123117 (2010); Selected for the Virtual Journal of Nanoscale Science and Technology, Vol. 21 (15), April 12, 2010.


F. Liu, C. Carraro, A. P. Pisano and R. Maboudian, “Growth and characterization of nitrogen-doped polycrystalline 3C-SiC thin films for harsh environment MEMS applications”, J. Micromech. Microeng. 20, 035011 (2010).

M. Zheng, K. Takei, B. Hsia, H. Fang, X. Zhang, N. Ferralis, H. Ko, Y.-L. Chueh, Y. Zhang, R. Maboudian, A. Javey, Metal-Catalyzed Crystallization of Amorphous Carbon to Graphene, Appl. Phys. Lett., 96, 063110 (2010).

A.Gutés, C. Carraro, R. Maboudian, "Silver Dendrites from Galvanic Displacement on Commercial Aluminum Foil As an Effective SERS Substrate", J. Am. Chem. Soc., 132, 1476-1477 (2010).

M. Cerruti, G. Doerk, G. Hernandez, C. Carraro, R. Maboudian, “Galvanic Deposition of Pt Clusters on Si: Effect of HF Concentration and Application as Catalyst for Silicon Nanowire Growth”, Langmuir, 26, 432-437 (2010).

W.-C. Lien, N. Ferralis, C. Carraro, R. Maboudian, "Growth of Epitaxial 3C-SiC Films on Si(100) via Low Temperature SiC Buffer Layer", Crystal Growth and Design, 10, 36-39 (2010).


  2009

N. Ferralis, F. El Gabaly, A.K Schmid, R. Maboudian, C. Carraro, "Real-time Observation of Reactive Spreading of Gold on Silicon", Phys. Rev. Lett., 103, 256102 (2009). ArXiv.org.

J. Lee, B. Bush, R. Maboudian and R. S. Fearing, “Gecko-Inspired Combined Lamellar and Nanofibrillar Array for Adhesion on Nonplanar Surface”, Langmuir, 25, 12449-12453 (2009).

A. Gutés, C. Carraro, R. Maboudian, "Silver Nanodesert Rose as a Substrate for Surface-Enhanced Raman Spectroscopy", ACS Appl. Mater. Interfaces, 1 (11),  2551–2555 (2009).

R. Kant, N. Ferralis, J Provine, R.T. Howe, R. Maboudian, "Micro-scale silicon migration in high temperature, low pressure, inert ambient", Electrochemical and Solid-State Letters, 12, H437-H440 (2009).

F. Liu, I. Laboriante, B. Bush, C. S. Roper, C. Carraro and R. Maboudian, "In situ studies of interfacial contact evolution via a two-axis deflecting cantilever microinstrument", Applied Physics Letters 95, 131902 (2009); also published in the Virtual Journal of Nanoscale Science and Technology, Vol. 20 (15), October 12, 2009.

A. Gutés, I. Laboriante, C. Carraro,  R. Maboudian, "Silver Nanostructures on Silicon Based on Galvanic Displacement Process", J. Phys. Chem. C, 113, 16939–16944 (2009).

G.S. Doerk, C. Carraro, R. Maboudian, "Temperature dependence of Raman spectra for individual silicon nanowires", Phys. Rev. B, 80, 073306 (2009); Selected for the Virtual Journal of Nanoscale Science and Technology, Vol. 20 (10), September 7, 2009.

W.-C. Lien, N. Ferralis, A. Pisano, C. Carraro, R. Maboudian, "Tunable in-situ growth of porous 3C-SiC thin films by high temperature hydrochloride etching", Applied Physics Letters, 95, 101901 (2009).

C. Roper, R.T. Howe, R. Maboudian, “Room Temperature Wet Etching of Polycrystalline and Nanocrystalline Silicon Carbide Thin Films with HF and HNO3”, Journal of the Electrochemical Society, 156, D104-D107 (2009).

M. Cerruti, J. Jaworski, J. Varadarajan, C. Carraro, S.-W. Lee, A. Majumdar, R. Maboudian, “Polymer-oligopeptide Composite Coating for Selective Detection of Explosives”, Analytical Chemistry, 81, 4192-4199 (2009).

F. Liu, C. Carrro, J. Chu, R. Maboudian, "Residual stress characterization of polycrystalline 3C-SiC films on Si(100) deposited from methylsilane", J. Appl. Phys. 106, 013505 (2009).

F. Liu, I. Laboriante, B. Bush, C. S. Roper, C. Carraro, R. Maboudian, "2-Axis MEMS deflecting cantilever microinstrument for in-situ reliability studies", Digest of Tech. Papers, the 15th International Conference on Solid-State Sensors & Actuators (Transducers '09), Denver, USA, June 21-25, 2009, pp. 1521-1524.

L. Muray, J. Spallas , C. Silver, S. Indermuehle,  N. Ferralis, C. Carraro, R. Maboudian, "Resolving sub-nm steps with a low-voltage miniature scanning electron microscope", Microelectronic Engineering, 86, 1004 (2009).

C. daRosa, E. Iglesia, R. Maboudian, “Copper Deposition onto Silicon by Galvanic Displacement: Effect of Cu Complex Formation in NH4F Solutions”, Electrochimica Acta., 54, 3270-3277 (2009).

F. Liu, C. S. Roper, C. Carraro, R. Maboudian, “Effect of Electrode Geometry and Surface Passivation on Corrosion of Polycrystalline Silicon Under High Relative Humidity and Bias”, Proc. 22nd IEEE International Conference on Micro Electro Mechanical Systems, (MEMS 2009) pp. 611-614.

F. Liu, C.S. Roper, I. Laboriante, B. Bush, J.R. Chu, C. Carraro and R. Maboudian, "Anodic Oxidation of Polycrystalline 3C-silicon carbide thin films during MEMS operation", J. Micromech. Microeng., 19, 035024 (2009).
 
R. Roper, R.T. Howe and R. Maboudian, “Electrical and Mechanical Characterization of Doped and Annealed  Polycrystalline 3C-SiC Thin Films Deposited in a Large-scale LPCVD Reactor”, Journal of the Electrochemical Society, 156, D5-D10 (2009). 


  2008

N. Ferralis, J. Kawasaki, R. Maboudian, C. Carraro, "Evolution in Surface Morphology of Epitaxial Graphene Layers on SiC Induced by Controlled Structural Strain", Applied Physics Letters, 93, 191916 (2008).

N. Ferralis, R. Maboudian, C. Carraro, "Evidence of Structural Strain on Epitaxial Graphene Layers on 6H-SiC(0001)", Physical Review Letters 101, 156801 (2008).

G.S. Doerk, N. Ferralis, C. Carraro, R. Maboudian, "Growth of Branching Si Nanowires Seeded by Au-Si Surface Migration", Journal of Materials Chemistry, 18, 5376-5381 (2008).  Featured on Journal Cover.

M. Cerruti, S. Fissolo, C. Carraro, C. Ricciardi, A. Majumdar, R. Maboudian, "Poly(ethylene glycol) Monolayer Formation and Stability on Gold and Silicon Nitride Substrates", Langmuir, 24, 10646-10653 (2008).

M. Rosso, A. Arafat, K. Schroën, M. Giesbers, C. S. Roper, R. G. White, E. J.R. Sudhölter, R. Maboudian, H. Zuilhof, “Covalent Attachment of Organic Monolayers to Silicon Carbide Surfaces”, Langmuir, 24, 4007-4012 (2008).

J. Zhang, J. W. Zimmer, R. T. Howe, R. Maboudian, “Characterization of Boron-doped Micro- and Nanocrystalline Diamond Films Deposited by Wafer-scale Hot Filament Chemical Vapor Deposition for MEMS Applications”, Diamond and Related Materials, 17, 23-28 (2008).

C.S. Roper, V. Radmilovic, R. T. Howe, R. Maboudian,  “Characterization of Polycrystalline 3C-SiC Films Deposited from the  Precursors 1,3-Disilabutane and Dichlorosilane”, Journal of Applied Physics, 103, 084907(1-6) (2008).

M. Hon, F. DelRio, J.T. White, M. Kending, C. Carraro, R.  Maboudian, “Cathodic Corrosion of Polycrystalline Si MEMS”, Sensors  and Actuators A, 145-146, 323-329 (2008).

C. daRosa, E. Iglesia, R. Maboudian, “Copper Deposition  onto Silicon by Galvanic Displacement: Effect of Silicon Dissolution Rate”, Journal of the Electrochemical Society, 155, E70-E78 (2008).

Ferralis, N., Maboudian, R., and Carraro, C., "Temperature-Induced Self-Pinning and Nanolayering of AuSi Eutectic Droplets", J. Am. Chem. Soc., 130 (8), 2681 -2685 (2008).

Roper, C. S., Radmilovic, V., Howe, R. T., and Maboudian, R., "Effects of annealing on residual stress and strain gradient of doped polycrystalline silicon carbide thin films", Electrochemical and Solid-State Letters, 11, D35-D37 (2008).

C. daRosa, E. Iglesia, R. Maboudian, “Dynamics of Cu deposition onto  Si by Galvanic Displacement”, Journal of the Electrochemical Society, 155, D234 (2008).
 

  2007

C. Carraro, R. Maboudian, L. Magagnin, "Metallization and nanostructuring of semiconductor surfaces by galvanic displacement processes", Surf. Sci. Reports, 62 (12), 499-525 (2007).

B.G.Bush, F.W. DelRio, J.Opatkiewiez, R. Maboudian, C. Carraro, "nCEffect of formation temperature and roughness on surface potential of octadecyltrichlorosilane self-assembled monolayer on silicon surfaces", J. Phys. Chem. C, 111, 49, 12339-12343 (2007).

J. Zhang, C. Carraro,  R.T. Howe, and R. Maboudian, “Electrical, mechanical and metal contact properties of polycrystalline 3C-SiC films for MEMS in harsh environments”, Surface and Coating Technology, 201 (22-23), 8893-8898 (2007).

F.W. DelRio, J. Lai, N. Ferralis, T-J. K. Liu, R. Maboudian, "Al-2%Si Induced Crystallization of Amorphous Silicon", Electrochemical and Solid-State Letters, 10 (11), H337-H339 (2007)

Ferralis, N., Maboudian, R., and Carraro, C., "Structure and Morphology of Annealed Gold Films Galvanically Displaced on the Si(111) Surface", J. Phys. Chem. C, 111 (20) 7508 - 7513 (2007).

I. Lombardi, P. L. Cavallotti, C. Carraro, and R. Maboudian, "Template assisted deposition of Ag nanoparticle arrays for surface-enhanced Raman scattering applications", Sensors and Actuators B - Chemical, 125 (2), 353-356, (2007).

A. San Paulo, N. Arellano, J.A. Plaza, R.R. He, C. Carraro, R. Maboudian, R. T. Howe, J. Bokor, P.D. Yang, "Suspended mechanical structures based on elastic silicon nanowire arrays", Nano Letters, 7 (4), 1100-1104, (2007).

V. Radmilovic, U. Dahmen, D. Gao, C.R. Stoldt, C. Carraro, and R. Maboudian, “Nucleation and Growth of 3C-SiC Films on Si(100) Substrate”, Diamond and Related Materials, 16, 74-80 (2007).


  2006

J. Frechette, C. Carraro, "Resolving radial composition gradients in polarized confocal Raman spectra of individual 3C-SiC nanowires", J. Am. Chem. Soc., 128 (46), 14774-14775 (2006).

J. Frechette, C. Carraro, " Diameter-dependent modulation and polarization anisotropy in Raman scattering from individual nanowires", Phys. Rev. B, 74 (16), 161404 (2006).

I. Lombardi, L. Magagnin, P. L. Cavallotti, C. Carraro, and R. Maboudian, "Electrochemical fabrication of supported Ni nanostructures through transferred porous anodic alumina mask", Electrochemical and Solid State Letters, 9 (5), D13-D16 (2006).

J. Oomens, N. Polfer, O. Pirali, Y. Ueno, R. Maboudian, P.W. May, J. Filik, J.E. Dahl, S.G. Liu, R.M.K. Carlson "Infrared spectroscopic investigation of higher diamondoids", Journal of Molecular Spectroscopy, 238, 158-167 (2006).

C. Roper, R. Howe, and R. Maboudian, "Stress control of polycrystalline 3C-SiC films in a large-scale LPCVD reactor using 1,3-disilabutane and dichlorosilane as precursors", J. Micromechanics and Microengineering, 16, 2736-2739 (2006).

C. Roper, C. Carraro, R. Howe, and R. Maboudian, “Silicon Carbide Thin Films using 1,3-Disilabutane Single Precursor for MEMS Applications - A Review”, ECS Trans., 3 (10), 267-280 (2006).

J. Frechette, R. Maboudian and C. Carraro, “Effect of Temperature on In-use Stiction of Cantilever Beams Coated with Perfluorinated Alkysiloxane Monolayers”, Journal of Microelectromechanical Systems, 15, 737-744 (2006).

J. Zhang, R.T. Howe, and R. Maboudian, “Control of Strain Gradient in Polycrystalline Silicon Carbide Films through Tailored Doping”, Journal of Micromechanics and Microengineering, 16, L1-L5 (2006).

C. Majidi, R.E. Groff, K. Autumn, S. Baek, B. Bush, R. Maboudian, N. Gravish, Y. Maeno, B. Schubert, M. Wilkenson and R. Fearing, “High Friction from a Stiff Fiber using Micro-Fiber Arrays”, Physical Review Letters, 97, 76103-06 (2006).

C. Roper, V. Radmilovic, R. Howe, and R. Maboudian “Single-Source Chemical Vapor Deposition of SiC Films in a Large-scale LPCVD Reactor: Growth, Chemical, and Mechanical Characterization”, Journal of the Electrochemical Society, 153 (8), C562-C566 (2006).

J. Frechette, R. Maboudian, and C. Carraro, “Thermal Behavior of Perfluoroalkylsiloxane Monolayers on the Oxidized Si(100) Surface”, Langmuir, 22, 2726-2730 (2006).

B. Bush, Z. Xu, C. Carraro, and R. Maboudian, “Layer-by-Layer Self-Assembled Conductive Thin Films for MEMS Applications”, Sensors and Actuators A, 126, 194-200 (2006).

I. Lombardi, L. Magagnin, P. L. Cavallotti, C. Carraro, and R. Maboudian, “Electrochemical Fabrication of Supported Ni Nanostructures through Transferred Porous Anodic Alumina Mask”, Electrochemical and Solid State Letters, 9, D13-16 (2006).

I. Lombardi, A. Hochbaum, P. Yang, C. Carraro, and R. Maboudian, “Synthesis of High Density, Size Controlled Si Nanowire Arrays via Porous Anodic Alumina Mask”, Chemistry of Materials, 18, 988-991 (2006).

J. Zhang, R.T. Howe, and R. Maboudian, “Electrical Characterization of n-type Polycrystalline 3C-Silicon Carbide Thin Film Deposited by 1,3-Disilabutane”, Journal of the Electrochemical Society, 153, G548-551 (2006).


  2005

S. Bhave, D. Gao and R. T. Howe, R. Maboudian, “Fully Differential Poly-SiC Lamé Mode Resonator and Checkboard Filter”, Technical Digest, Proceedings of the 2005 MEMS Workshop, (MEMS ’05), January 2005, pp. 223-336.

R. He, D. Gao, R. Fan, A. Hochbaum, C. Carraro, R. Maboudian, P. Yang, "Si Nanowire Bridges in Micro-trenches: Integration of Growth into Device Fabrication", Advanced Materials, 17, 2098-2102 (2005).

A. San Paulo, J. Bokor, R. T. Howe, R. He, P. Yang, D. Gao, C. Carraro, R. Maboudian, "Mechanical Elasticity of Single and Double Clamped Silicon Nanobeams Fabricated by Vapor-Liquid-Solid Synthesis", Applied Physics Letters, 87, 53111-53113 (2005).

E.E. Parker, C. Carraro, R. Maboudian, "Adhesion Characteristics of MEMS in Microfluidic Environments", Journal of Microelectromechanical Systems, 14, 947-953 (2005).

D. Gao, R. He, C. Carraro, R. T. Howe, P. Yang, and R. Maboudian, "Selective Growth of Si Nanowires Arrays via Galvanic Displacement Processes", Journal of the American Chemical Society, 127, 4574-4575 (2005).


  2004

D. Gao, C. Carraro, V. Radmilovic, R.T.Howe and R. Maboudian, "Fracture of Polycrystalline 3C-SiC Films in MEMS", Journal of Microelectromechanical Systems ,13, 972-976 (2004).

W. R. Ashurst, Y. J. Jang, L. Magagnin, C. Carraro, M. M. Sung, R. Maboudian, "Nanometer-Thin Titania Films with SAM-level Stiction and Superior Wear Resistance for Reliable MEMS Performance", Proceedings of IEEE MEMS Conference, Maastricht, the Netherlands, January 2004, pp. 153-156.

E.E. Parker, W. R. Ashurst, C. Carraro, R. Maboudian, "Stiction in Microfluidic Environments", Technical Digest, Proceedings of the 2002 Solid-State Sensor and Actuator Workshop, Hilton Head '04, June 2004, pp. 316-319.

W. R. Ashurst, M. B.J. Wijesundara, C. Carraro, R. Maboudian, "Tribological Impact of SiC Encapsulation of Released Polysilicon Microstructures", Tribology Letters, 17, 195-198 (2004).

H. Lim, C. Carraro, R. Maboudian, M. Pruessner, R. Ghodssi, "Chemical and Thermal Behavior of Alkanethiol and Sulfur Passivated InP(100)", Langmuir, 20, 743-747 (2004).

M.P. de Boer, D.L. Luck, W.R. Ashurst, R. Maboudian, A.D. Corwin, J.A. Walraven, J.M. Redmond, "High-performance Surface-micromachined Inchworm Actuator", Journal of Microelectromechanical Systems, 13, 63-74 (2004).

R. Maboudian, C. Carraro, "Surface Chemistry and Tribology of MEMS", Annual Review of Physical Chemistry, 54, 35-54 (2004).

D. Gao, W.B.J. Wijesundara, C. Carraro, R.T. Howe, and R. Maboudian, “Recent Progress Toward A Manufacturable SiC Surface Micromachining Technology,” IEEE Sensors Journal, 4 (4), special issue on "Micro-Sensors and Micro-Actuators: Technology and Applications," 441-448 (2004).

D. Gao, W.R. Ashurst, C. Carraro, R.T. Howe, and R. Maboudian, “Silicon Carbide for Enhanced MEMS Reliability,” Tech. Dig. Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, South Carolina, 192-195 (2004).

R. Ashurst, C. Carraro, J.D. Chinn, V. Fuentes, B. Kobrin, R. Maboudian, R. Nowak, R. Yi. "Improved vapor-phase deposition technique for anti-stiction monolayers," Proceedings of SPIE - the International Society for Optical Engineering, 5342 (1), 204-211 (2004).

G. Valente, M.B.J. Wijesundara, R. Maboudian, C. Carraro. "Single-source CVD of 3C-SiC films in a LPCVD Reactor Part II: Reactor Modeling and Chemical Kinetics," Journal of the Electrochemical Society, 151 (3), C215-19 (2004).

M.B.J. Wijesundara, G. Valente, W.R. Ashurst, R.T. Howe, A.P. Pisano, C. Carraro, R. Maboudian. "Single-source chemical vapor deposition of 3C-SiC films in a LPCVD Reactor Part I: Growth, Structure and Chemical Characterization," Journal of the Electrochemical Society, 151 (3), C210-14 (2004).

D. Gao, M.B.J. Wijesundara, C. Carraro, R.T. Howe, and R. Maboudian,"Transformer Coupled Plasma Etching of 3C-SiC Films using Fluorinated Chemistry for MEMS Applications," Journal of Vacuum Science & Technology B, 22 (2), 513-518 (2004), selected for the March 1, 2004 issue of Virtual Journal of Nanoscale Science & Technology.


  2003

M.B.J. Wijesundara, D.C. Walther, C.R. Stoldt, K. Fu, D. Gao, C. Carraro, R. Maboudian, A.P. Pisano, "Low Temperature CVD SiC Coated Si Microcomponents for Reduced Scale Engines", ASME International Mechanical Engineering Congress and Exposition, November 15-21, 2003, pp. 173-180.

R. Maboudian, C. Carraro, "Surface Engineering for Reliable Operation of MEMS Devices", Journal of Adhesion Science and Technology, 17, 583-591 (2003).

W.R. Ashurst, C. Carraro, R. Maboudian. "Vapor phase anti-stiction coatings for MEMS," IEEE Transactions on Device & Materials Reliability, 3 (4), 173-178 (2003).

A.C. Fernandez-Pello, A.P. Pisano, K. Fu, D.C. Walther, A. Knobloch, F. Martinez, M. Senesky, C. Stoldt, R. Maboudian, S. Sanders, D. Liepmann. "MEMS rotary engine power system," Transactions of the Institute of Electrical Engineers of Japan, Part E, 123-E(9), 326-30 (2003)

M.B.J. Wijesundara, D. Gao, C. Carraro, R.T. Howe, and R. Maboudian, "Nitrogen Doping of Polycrystalline 3C-SiC Films Grown using 1,3-Disilabutane in a Conventional LPCVD Reactor," Journal of Crystal Growth, 259, 18-25 (2003).

D. Gao, M.B.J. Wijesundara, R.T. Howe, and R. Maboudian, "Characterization of Residual Strain in SiC Films Deposited using 1,3-Disilabutane for MEMS Applications," Journal of Microlithography, Microfabrication, and Microsystems, 2 (4), 259-264 (2003).

G. Valente, C. Stoldt, R. Maboudian, and C. Carraro, "Theoretical and Experimental Study of the Chemisorption of 1,3-disilabutane on the Si(100) Surface", Journal of Chemical Physics, 118, 6089-6097 (2003).

W. R. Ashurst, M. P. deBoer, C. Carraro, and R. Maboudian, "An Investigation of Side-wall Adhesion in MEMS", Applied Surface Science, 212-213, 735-41 (2003).

W. R. Ashurst, C. Carraro, R. Maboudian, and W. Frey, "Wafer Level Anti-Stiction Coatings with Superior Thermal Stability", Sensors and Actuators A, 104, 213-221 (2003).

L. Magagnin, R. Maboudian and C. Carraro, "Adhesion Evaluation of ImmersionPlating Copper Films on Silicon by Microindentation Measurements", Thin Solid Films, 434, 100-105 (2003).

D. Gao, R.T. Howe, and R. Maboudian, "High-selectivity Etching of Polycrystalline 3C-SiC Films using HBr-based Transformer Coupled Plasma", Applied Physics Letters, 82 (11), 1742-4 (2003). & Selected paper, Virtual Journal of Nanoscale Science & Technology, Volume 7 (12), (2003).

D. Gao, M.B.J. Wijesundara, C. Carraro, C.W. Low, R.T. Howe, and R. Maboudian, “High Modulus Polycrystalline 3C-SiC Technology For RF MEMS”, Proc. Transducers ’03, The 12th International Conf. Solid-State Sensors & Actuators, pp. 1160-1163.


  2002

W. R. Ashurst, C. Carraro, and W. Frey, R. Maboudian, "Wafer Level Anti-Stiction Coatings with Superior Thermal Stability", Technical Digest, Proceedings of the 2002 Solid-State Sensor and Actuator Workshop, Hilton Head '02, June 2002, pp. 142-145.

C. Carraro and L. Magagnin, R. Maboudian, "Selective Metallization of Si Micromechanical Devices", Electrochimica Acta, 47, 2583-2588 (2002).

L. Magagnin V. Bertani, P.L. Cavallotti, R. Maboudian and C. Carraro "Selective deposition of gold nanoclusters on silicon by a galvanic displacement process", Microelectronic Engineering, 64, 479-485 (2002).

M. B. J. Wijesundara, C. R. Stoldt, C. Carraro, R. T. Howe and R. Maboudian, "Nitrogen Doping of 3C-SiC Films Grown by Single-Source Chemical Vapor Deposition", Journal of Thin Solid Films, 419, 69-75 (2002).

C.R. Stoldt, C. Carraro, W.R. Ashurst, D. Gao, R. T. Howe and R. Maboudian, "A Low-Temperature CVD Process for Silicon Carbide MEMS," Sensors and Actuators A, 97, 410-415 (2002).

L. Magagnin, R. Maboudian and C. Carraro, "Gold Deposition by Galvanic Displacement on Semiconductor Surfaces: Effect of Substrate on Adhesion", Journal of Physical Chemistry B, 106, 401-407 (2002).

R. Maboudian, W. R. Ashurst and C. Carraro, "Tribological Challenges in MEMS", Tribology Letters, 12, 95-100 (2002).


  2001

W. R. Ashurst, C. Yau, C. Carraro, R. Maboudian and M. T. Dugger, "Dimethyldichlorosilane as Anti-Stiction Coating for MEMS: a Quantitative Comparison to Octadecyltrichlorosilane", Journal of Microelectromechanical Systems, 10, 41-49 (2001).

W. R. Ashurst, C. Yau, C. Carraro and R. T. Howe, and R. Maboudian, "Alkene Based Monolayer Films as Anti-Stiction Coatings for Polysilicon MEMS", Sensors and Actuators A, 91, 239-248 (2001).

M. C. Salvadori, M. C. Fritz, C. Carraro, R. Maboudian, O. R. Monteiro and I. G. Brown, "Characterization of AFM Cantilevers Coated with Diamond-like Carbon", Diamond and Related Materials, 10, 2190-2194 (2001).

M. C. Fritz, C. Carraro, and R. Maboudian, "Functionalization of Scanning Force Microscopy Cantilevers via Galvanic Displacement Technique", Tribology Letters, 11, 171-175 (2001).

C.R. Stoldt, M.C. Fritz, C. Carraro, and R. Maboudian, "Micromechanical Properties of Silicon Carbide Thin Films Deposited Using Singe-Source CVD," Applied Physics Letters, 79, 347 (2001) .

C.R. Stoldt, C. Carraro, W.R. Ashurst, M.C. Fritz, D. Gao, and R. Maboudian, "Novel Low-Temperature CVD Process for Silicon Carbide MEMS," Proceedings Transducers '01, Proceedings of 11th International Conference on Solid State Sensors and Actuators / Eurosensors XV, Munich, Germany, June 10-14, pp. 984-987.

C. R. Stoldt, R. Maboudian, and C. Carraro, "Vibrational Spectra of Hydrogenated Buckminsterfullerene: A Candidate for the Unidentified Infrared Emission", The Astrophysical Journal Letters,  548 (2), L225-L228 (2001).

L. Magagnin, R. Maboudian, and C. Carraro, "Selective Deposition of Thin Copper Films onto Silicon with Improved Adhesion", Electrochemical and Solid-State Letters, 4 (1), C5-C7 (2001).

Sang M. Han, W. Robert Ashurst, Carlo Carraro, and Roya Maboudian, "Formation of Alkanethiol Monolayer on Ge(111)", Journal of the American Chemical Society, 2001.


  2000

C.R. Stoldt, C. Carraro, R. Maboudian, "Deuterium etching of the Si-rich SiC(0001) (3×3) surface reconstruction", Surface Science, 466, 66-72 (2000).

C. Cabuz, E. I. Cabuz, T. R. Ohnstein, J. Neus, and R. Maboudian, "Factors Enhancing the Reliability of Touch-Mode Electrostatic Actuators", Sensors and Actuators A, 79, 245-25 (2000).

M. M. Sung, C. Carraro, O. W. Yauw, and Y. Kim,g, C. Carraro, O. W. Yauw, and Y. Kim, and R. Maboudian, "Reversible Liquid-Liquid Transitions in the Early Stages of Monolayer Self-Assembly", Journal of Physical Chemistry", Journal of Physical Chemistry B, 104, 1556-1559 (2000).

W. R. Ashurst, C. Carraro, and R. Maboudian, "Self-Assembled Monolayers as Anti-Stiction Coating for MEMS: Characteristics and Recent Progress", Sensors and Actuators A, 82, 219-223 (2000).

W. R. Ashurst, C. Yau, C. Carraro and R. T. Howe, "Alkene Based Monolayer Films as Anti-Stiction Coatings for Polysilicon MEMS", Proceedings of Solid-State Sensor and Actuator Workshop, Hilton Head 2000, Hilton Head Island, SC, June 2000, pp. 320-323.


  1999

M.M. Sung, G.J. Kluth, and R. Maboudian, "Formation of Alkylsiloxane Monolayers on Si3N4" , Journal of Vacuum Science and Technology A, 17, 540-544 (1999).

G.J. Kluth, C. Carraro and and R. Maboudian, "Direct Observation of Sulfur Dimers in Alkanethiol Self-Assembled Monolayers on Au" , Physcial Review B, 59, 10449-10452 (1999).

R. Maboudian, "Self-Assembled Monolayers as Anti-Stiction Coating for MEMS", Invited review article, 10th International Conference on Solid-State Sensors and Actuators, Transducers'99, pp.22-25, 1999.

M. M. Sung, G. J. Kluth, and R. Maboudian, "Alkylsiloxane Self-Assembled Monolayers on Si3N4", Journal of Vacuum Science and Technology A, 17, 540-544 (1999).


  1998

R. Maboudian, "Surface Processes in MEMS Technology", Surface Science Reports, 30, 207-270 (1998).

U. Srinivasan, M. R. Houston, R. T. Howe, and R. Maboudian, "Alkylsiloxane-based Self-Assembled Monolayers for Stiction Reduction in Silicon Micromachines", Journal of Microelectromechanical Systems, 7, 252-260 (1998).

G. J. Kluth, M. Sander, M. M. Sung, and R. Maboudian, "Study of the Desorption Mechanism of Alkylsiloxane Self-Assembled Monolayersthrough Isotopic Labeling and HREELS Experiments", Journal of Vacuum Science and Technology A, 16, 932-936 (1998).

R. Maboudian, "Adhesion and Friction Issues Associated with Reliable Operation of MEMS", Materials Research Society Bulletin, 23, 47-51 (1998).

U. Srinivasan, R. T. Howe, and R. Maboudian, "Lubrication of Polysilicon Micromechanisms with Alkylsiloxane Self-Assembled Monolayers: Coefficient of Static Friction Measurements", Proceedings of Tribology Issues and Opportunities in MEMS Workshop, Kluwer Academic Publishers, Dordrecht, pp. 597-606 (1998).

U. Srinivasan, J. D. Foster, U. Habib, R. T. Howe, R. Maboudian, D. C. Senft, and M. T. Dugger, "Lubrication of Polysilicon Micromechanisms with Alkylsiloxane Self-Assembled Monolayers", Technical Digest, Proceedings of the 1998 Solid-State Sensor and Actuator Workshop, Hilton Head '98 , pp. 156-161 (1998).

C. Cabuz, E. I. Cabuz, T. R. Ohnstein, J. Neus, and R. Maboudian, "High Reliability Touch-Mode Electrostatic Actuators (TMEA)", Technical Digest, Proceedings of the 1998 Solid-State Sensor and Actuator Workshop, Hilton Head '98 , pp. 296-299 (1998).

C. Carraro, O. W. Yauw, M. M. Sung, and R. Maboudian, "Observation of Three Growth Mechanisms in Self-Assembled Monolayers", Journal of Physical Chemistry, 102, pp. 4441-4445 (1998).

R. Maboudian, "Anti-Stiction Coatings for Surface Micromachines", SPIE, 3511, 108-113 (1998).


  1997

U. Srinivasan, M. R. Houston and R. T. Howe, R. Maboudian, "Self-Assembled Fluorocarbon Films for Enhanced Stiction Reduction", Technical Digest, Proceedings of the 9th International Conference on Solid-State Sensors and Actuators, Transducers '97, pp. 210-213 (1997).

R. Maboudian, and R.T. Howe, "Critical Review: Adhesion in Surface Micro-Mechanical Structures", Journal of Vacuum Science and Technology B, 15, 1-20 (1997).

M.R. Houston, R. Maboudian, and R.T. Howe, "Effect of Hydrogen Termination on the Work of Adhesion between Rough Polycrystalline Silicon Surfaces", Journal of Applied Physics, 81, 3474-3483 (1997).

R. Maboudian, and R.T. Howe, "Stiction Reduction Processes for Surface Micromachines",Tribology Letters, 3, 215-222 (1997).

G.J. Kluth, M.M. Sung, and R. Maboudian, "Thermal Behavior of Alkylsiloxane Self-Assembled Monolayers on the Oxidized Si(100)", Langmuir, 13, 3775-378 (1997).

M.M. Sung, G.J. Kluth, O.W. Yauw, and R. Maboudian, "Thermal Behavior of Alkyl Monolayers on the Si (100) Surface", Langmuir, 13, 6164-6168 (1997).

G.J. Kluth, M.M. Sung and R. Maboudian, "Interaction of H/D Atoms with Alkylsiloxane Self-Assembled Monolayer on the Si(100) Surface", Langmuir, 13, 6491-6496 (1997).


  1996

M.R. Houston, R. Maboudian, and R.T. Howe, "Self-Assembled Monolayer Films as Durable Anti-Stiction Coatings for Polysilicon Microstructures", Proceedings of the 1996 Solid-State Sensor and Actuator Workshop, Hilton Head '96, pp. 42-47 (1996).

G. J. Kluth, and R. Maboudian, "Oxidation Mechanism of Ammonium Fluoride-Treated Si(100) Surfaces", Journal of Applied Physics, 80, 5408-5414 (1996).


  1995

W. Widdra, S. I. Yi, R. Maboudian, G. A. D. Briggs, and W. H. Weinberg , "Adsorption, Abstraction, and Pairing of Atomic Hydrogen on Si(100)-(2x1) Surfaces" , Physical Review Letters, 74, 2074-2077 (1995).

M.R. Houston, R. Maboudian, and R.T. Howe , "Ammonium Fluoride Anti-Stiction Treatments for Poly-Silicon Microstructures", Proceedings of the 8th International Conference on Solid-State Sensors and Actuators, pp. 210-213 (1995).

M.R. Houston and R. Maboudian, "Stability of NH4F-Treated Si(100)", Journal of Applied Physics78, 3801-3808 (1995).

M.R. Houston, R.T. Howe, K. Komvopoulos and R. Maboudian, "Diamond-Like Carbon Films for Silicon Passivation in Microelectromechanical Devices", Materials Research Society Symposium Proceedings, 383, 391-402, (1995).