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Ian Laboriante
Alumnus - Postdoctoral Researcher

Ph.D. in Chemistry, University of Houston (2007)
B.S. in Chemistry, University of the Philippines - Diliman (2000)

Email:

ilaboriante (at) micron.com

Current Position:

Process Development Engineer
Micron Technology, Inc.
8000 S Federal Way
Boise, ID 83707 United States
Bldg 36, Room 205A
Mail stop 1-717
Phone: +1-208-363-3275
Fax: +1-208-368-2548


  Research:
My principal research interest has been in the areas of surface science and nanotribology, especially as it pertains to the interfacial properties,e.g. adhesion, friction, wear, and lubrication of nano-/microelectromechanical systems (N/MEMS). My current research work involves materials characterization, surface modification and treatment, development of new methods to fabricate MEMS, and the use of an array of scanning probe and surface-sensitive analytical techniques to achieve my research goals. Some of the projects I worked on under the auspices  of DARPA-sponsored Center on Interfacial Engineering for Microelectromechanical Systems (CIEMS) included:    

 

1. Nanotribological characterization of MEMS surfaces through various microfabricated tribology-on-a-chip test structures as a function of device, process and environmental parameters.

2. The study of fundamental surface properties of novel metal-based structural materials and coatings, e.g. Ti, W, Ni, Al and their respective alloys--- as alternative to conventional Si-based MEMS processes.

3. The study of reliability issues in MEMS devices from a surface chemistry perspective, e.g. corrosion in poly-Si and SiC structural materials and coatings.

4. Investigation of the charging phenomenon in dielectric materials used in MEMS architecture.

5. Electrochemical mechanical polishing (E-CMP) of silicon carbide surfaces.

6. Development of scanning probe nanolithographic techniques on Si substrates using AFM/EFM with potential applications in nanoelectronic and nanomechanical devices.