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Gwiy-Sang Chung
Visiting Scholar

Ph. D., Toyohashi Univ. of Tech. Toyohashi, Electrical & Electronic Eng., Japan
M. S., Yeungnam Univ. Gyongsan, Electronic Eng., South Korea
B.S., Yeungnam Univ. Gyongsan, Electronic Eng., South Korea

Email:

gschung (at) dongseo.ac.kr

Current Position

Department of Mechatronics Engineering
Dongseo University, San69-1 Churyedong Sasanggu Busan 107-716
South Korea
Tel: +82-51-320-1763
Fax: +82-51-328-1569


 Research:

3C-SiC Crystal growth on Si wafers by APCVD.
Evaluation of 3C-SiC thin-films grown on Si wafers
Oxidation, metallization (Ohmic contact), etching(RIE, ICP RIE) process techniques of 3C-SiC thin-films
High temperature pressure, flower and magnetic sensors using 3C-SiC thin-films.
Anodic Bonding of Si wafer to MLCA (Multi Layer Ceramic Actuator)
Piezo micro valve using MLCA.
Fabrication and analysis of 3D SiCN microstructures for 1400℃ super-temperature MEMS applications.