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Fang Liu
Alumna - Postdoctoral Researcher

Ph.D, Engineering of Instrument Science and Technology, University of Science & Technology of China, December, 2009 (accomplished Ph.D research in University of California at Berkeley, USA).
B.S., Mechanical Engineering, University of Science & Technology of China, 2005


fang.liu (at)

Current Position:

Sr. MEMS Process Development Engineer
Analog Devices, Inc.


1. Harsh environment N/MEMS materials development and devices design.
2. Surface/interface chemical and physical modification schemes development to enhance MEMS reliability
3. Micro-instruments design for MEMS reliability studies.

Selected Publications:

1. F. Liu, C. Carraro, A.P. Pisano and R. Maboudian, “Growth and characterization of nitrogen-doped polycrystalline 3C-SiC thin films for harsh environment MEMS applications”, J. Micromech. Microeng. 20 035011, (2010).

2. F. Liu, I. Laboriante, B. Bush, C. S. Roper, C. Carraro and R. Maboudian, “In situ Reliability Studies of Interfacial Contact via A2-axis Deflecting Cantilever Microinstrument”, Applied Physics Letters, 95, 131902 (2009).

3. F. Liu, C. Carraro, J. Chu, R. Maboudian, “Residual Stress Characterization of Polycrystalline 3C-SiC Films on Si(100) Deposited from Methylsilane”, Journal of Applied Physics, 106, 013505 (2009).

4. F. Liu, C.S. Roper, I. Laboriante, B. Bush, J.R. Chu, C. Carraro and R. Maboudian, "Anodic Oxidation of Polycrystalline 3C-silicon Carbide Thin Films during MEMS Operation", J. Micromech. Microeng. 19, 035024 (2009).