Journal of New Technology and Materials


Vol. 02, N°02 (2012) 13-17


UV laser irradiation-induced crystallization in titania thick films prepared using a sol-gel method


O. Berkania,b*, K. Latrousb, H. El Hamzaouic, , M. Bouazaouic and B. Capoenc

a Department of physics, University Mentouri Constantine, Algeria

b Laboratoire des Composants Actifs et Matériaux,
Université d’Oum El Bouaghi, 04000 route de Constantine OEB, Algérie

c Laboratoire de Physique des Lasers, Atomes et molécules (PhLAM), UMR 8523

Université de Lille 1, Sciences et Technologies, 59655 Villeneuve d'Ascq Cedex (France)

* Corresponding author : Tel : +213 6 68 04 72 75; fax: +213 32 47 61 55; Email : 

Received: 23 May 2011, accepted: 11 October 2012


Titanium dioxide films of 5 µm thickness have been deposited on soda-lime glass substrates by dip-coating from a suspension of titanium dioxide powder prepared using a sol-gel route. After a heat-treatment, the obtained films have been irradiated using ArF excimer laser. The effect of the laser fluence, ranging between 115 mJ/cm2 and 495 mJ/cm2; on the crystallization of the deposited films has been studied. The irradiated areas were characterized using micro-Raman spectroscopy. While the as-deposited films were amorphous, irradiated areas display anatase or rutile crystalline structures, depending on the laser fluence. The corresponding local temperature range was evaluated to 700-800°C. Moreover, the apparent darkening of the layer when increasing the laser fluence was attributed to a re-arrangement of particles under laser-annealing.

Keywords: Sol-Gel, TiO2 films, Laser irradiation, Crystallization, Raman spectroscopy.