Ellipsometry Materials

Ellipsometry is a precise measurement technique that can characterize optical properties and thicknesses of thin films (thin as 10 nm or less with precision to 0.1 nm or better).

More about ellipsometry:

The trick to ellipsometry is finding reference material models against which to verify your results.  See the subpages, below, for more information about each material our ellipsometry work covers.
Subpages (4): A-Ge A-Si A-SiGe SiO2
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